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Paper Abstract and Keywords
Presentation 2011-12-16 15:20
Development of Process Simulators for Laser Crystallization -- Development of 2-Dimensional and 3-Dimentional Simulators --
Mutsumi Kimura, Kuniaki Matsuki, Ryusuke Saito, Shuji Tsukamoto (Ryukoku Univ.) SDM2011-143
Abstract (in Japanese) (See Japanese page) 
(in English) We are developing process simulators for laser crystallization. We have developed 2-dimensional and 3-dimentional simulators to which the nucleation rate, crystal growth velocity, and partial crystallization models are embedded. The behavior of the crystallization, formation of columnar grains, mechanism of -CZ technique, dependence of the grain size on the substrate temperature, and dependence of the grain size on the interface nucleation rate were clarified.
Keyword (in Japanese) (See Japanese page) 
(in English) Laser Crystallization / Process Simulator / 2-Dimentional / 3-Dimentional / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 357, SDM2011-143, pp. 59-64, Dec. 2011.
Paper # SDM2011-143 
Date of Issue 2011-12-09 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2011-12-16 - 2011-12-16 
Place (in Japanese) (See Japanese page) 
Place (in English) NAIST 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Fabrication and Evaluation of Silicon related Materials 
Paper Information
Registration To SDM 
Conference Code 2011-12-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of Process Simulators for Laser Crystallization 
Sub Title (in English) Development of 2-Dimensional and 3-Dimentional Simulators 
Keyword(1) Laser Crystallization  
Keyword(2) Process Simulator  
Keyword(3) 2-Dimentional  
Keyword(4) 3-Dimentional  
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1st Author's Name Mutsumi Kimura  
1st Author's Affiliation Ryukoku University (Ryukoku Univ.)
2nd Author's Name Kuniaki Matsuki  
2nd Author's Affiliation Ryukoku University (Ryukoku Univ.)
3rd Author's Name Ryusuke Saito  
3rd Author's Affiliation Ryukoku University (Ryukoku Univ.)
4th Author's Name Shuji Tsukamoto  
4th Author's Affiliation Ryukoku University (Ryukoku Univ.)
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Speaker Author-1 
Date Time 2011-12-16 15:20:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2011-143 
Volume (vol) vol.111 
Number (no) no.357 
Page pp.59-64 
#Pages 6 
Date of Issue 2011-12-09 (SDM) 

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