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| Presentation | 2012-03-16 11:15 Extraction of Equivalent Anisotropic Material Property of Periodically Arranged Dummy Metal Fills in a CMOS chip Takuichi Hirano, Kenichi Okada, Jiro Hirokawa, Makoto Ando (Tokyo Tech)  AP2011-208 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Equivalent anisotropic material property of periodically arranged dummy metal fills in a CMOS chip is extracted using eigenmode analysis of a unit-cell. 5m-squared dummy metal fills, whose size is 1/1000 of the free space wavelength at 60GHz, is considered. It is found that dummy metal fills act as artificial dielectric material, and its equivalent dielectric constant becomes larger than that of filling insulator SiO2. The equivalent loss tangent is also obtained because the conductivity of the dummy metal fills, aluminum, is considered. The validity of the equivalent material property is confirmed by comparing the calculated results of the real model and equivalent material property model of a finite-length parallel-plate waveguide filled with dummy metal fills. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Dummy metal fills / CMOS / Equivalent material property / Anisotropic / Extraction / Eigenmode analysis / Periodic structure / | |
| Reference Info. | IEICE Tech. Rep., vol. 111, no. 487, AP2011-208, pp. 55-60, March 2012. | |
| Paper # | AP2011-208 | |
| Date of Issue | 2012-03-08 (AP) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | AP2011-208 |
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| Conference Information | |
| Committee | AP |
| Conference Date | 2012-03-15 - 2012-03-16 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Chuo public hall (Atami City) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Antennas and Propagation |
| Paper Information | |
| Registration To | AP |
| Conference Code | 2012-03-AP |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Extraction of Equivalent Anisotropic Material Property of Periodically Arranged Dummy Metal Fills in a CMOS chip |
| Sub Title (in English) | |
| Keyword(1) | Dummy metal fills |
| Keyword(2) | CMOS |
| Keyword(3) | Equivalent material property |
| Keyword(4) | Anisotropic |
| Keyword(5) | Extraction |
| Keyword(6) | Eigenmode analysis |
| Keyword(7) | Periodic structure |
| Keyword(8) | |
| 1st Author's Name | Takuichi Hirano |
| 1st Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech) |
| 2nd Author's Name | Kenichi Okada |
| 2nd Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech) |
| 3rd Author's Name | Jiro Hirokawa |
| 3rd Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech) |
| 4th Author's Name | Makoto Ando |
| 4th Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech) |
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| Speaker | Author-1 |
| Date Time | 2012-03-16 11:15:00 |
| Presentation Time | 25 minutes |
| Registration for | AP |
| Paper # | AP2011-208 |
| Volume (vol) | vol.111 |
| Number (no) | no.487 |
| Page | pp.55-60 |
| #Pages | 6 |
| Date of Issue | 2012-03-08 (AP) |
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