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Paper Abstract and Keywords
Presentation 2012-03-26 10:25
High Voltage Torelant Capacitance Measurement Circuit Proper to MEMS integrated LSI
Kazutoshi Kodama, Makoto Ikeda (Univ. of Tokyo) ICD2011-146
Abstract (in Japanese) (See Japanese page) 
(in English) This paper proposes a high voltage torelant MEMS capacitance measurement circuit which does not depend on charge of capacitance. Interfaces for MEMS driving and sensing are mostly composed of capacitor, and LSI measures their capacitance. In case of the applications which are drriven by charge of the capacitor, it is required that measurement result does not depend on the charge. As driving voltage of MEMS is higher than that of LSI, it is important for the measurement circuit to consider voltage torelant. To realize a circuit which meets the demand of these, our proposed circuit draw constant charge of the capacitor and calculate the capacitance from amount of voltage change. The availability of proposed method is shown by simulation.
Keyword (in Japanese) (See Japanese page) 
(in English) Capacitance measurement / High voltage torelant / MEMS integrated LSI / / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 497, ICD2011-146, pp. 7-12, March 2012.
Paper # ICD2011-146 
Date of Issue 2012-03-19 (ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2011-146

Conference Information
Committee ICD  
Conference Date 2012-03-26 - 2012-03-26 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ICD 
Conference Code 2012-03-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) High Voltage Torelant Capacitance Measurement Circuit Proper to MEMS integrated LSI 
Sub Title (in English)  
Keyword(1) Capacitance measurement  
Keyword(2) High voltage torelant  
Keyword(3) MEMS integrated LSI  
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1st Author's Name Kazutoshi Kodama  
1st Author's Affiliation The University of Tokyo (Univ. of Tokyo)
2nd Author's Name Makoto Ikeda  
2nd Author's Affiliation The University of Tokyo (Univ. of Tokyo)
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Speaker Author-1 
Date Time 2012-03-26 10:25:00 
Presentation Time 25 minutes 
Registration for ICD 
Paper # ICD2011-146 
Volume (vol) vol.111 
Number (no) no.497 
Page pp.7-12 
#Pages 6 
Date of Issue 2012-03-19 (ICD) 

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