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| Presentation | 2012-05-17 15:30 A Surface-stress Sensor Based on a MEMS Fabry-Perot Interferometer for Label-free Protein Detection Kazuhiro Takahashi, Hiroki Oyama, Nobuo Misawa, Koichi Okumura, Makoto Ishida, Kazuaki Sawada (Toyohashi Tech.)  ED2012-22 CPM2012-6 SDM2012-24 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have newly developed a label-free protein sensor based on a MEMS Fabry-Perot interferometer integrated with a photodiode, which utilizes nonlinear optical transmittance of the Fabry-Perot interference to enhance the sensitivity of surface stress. A parylene was used for a deformable membrane of the protein sensor because of the high optical transmittance and low Young’s modulus. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1 mN/m which istwo orders of magnitude above the peizoresistive type. A photocurrent was demonstrated to shift by 23.7 nA at 3 V bias voltage with immobilized antibodies. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | MEMS / Protein sensor / Fabry-Perot interferometer / Label free / Surface stress / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 112, no. 32, ED2012-22, pp. 25-28, May 2012. | |
| Paper # | ED2012-22 | |
| Date of Issue | 2012-05-10 (ED, CPM, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2012-22 CPM2012-6 SDM2012-24 |
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| Conference Information | |
| Committee | ED SDM CPM |
| Conference Date | 2012-05-17 - 2012-05-18 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | VBL, Toyohashi Univ. of Technol. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2012-05-ED-SDM-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Surface-stress Sensor Based on a MEMS Fabry-Perot Interferometer for Label-free Protein Detection |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | Protein sensor |
| Keyword(3) | Fabry-Perot interferometer |
| Keyword(4) | Label free |
| Keyword(5) | Surface stress |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Kazuhiro Takahashi |
| 1st Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 2nd Author's Name | Hiroki Oyama |
| 2nd Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 3rd Author's Name | Nobuo Misawa |
| 3rd Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 4th Author's Name | Koichi Okumura |
| 4th Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 5th Author's Name | Makoto Ishida |
| 5th Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| 6th Author's Name | Kazuaki Sawada |
| 6th Author's Affiliation | Toyohashi University of Technology (Toyohashi Tech.) |
| Speaker | Author-1 |
| Date Time | 2012-05-17 15:30:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2012-22, CPM2012-6, SDM2012-24 |
| Volume (vol) | vol.112 |
| Number (no) | no.32(ED), no.33(CPM), no.34(SDM) |
| Page | pp.25-28 |
| #Pages | 4 |
| Date of Issue | 2012-05-10 (ED, CPM, SDM) |
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