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| Presentation | 2012-08-02 15:55 Scalable 3-D vertical chain-cell-type phase-change memory with 4F2 poly-Si diodes Masaharu Kinoshita, Yoshitaka Sasago, Hiroyuki Minemura, Yumiko Anzai, Mitsuharu Tai, Yoshihisa Fujisaki, Shuichi Kusaba, Tadao Morimoto, Takashi Takahama, Toshiyuki Mine, Akio Shima, Yoshiki Yonamoto, Takashi Kobayashi (Hitachi)  SDM2012-74 ICD2012-42 Link to ES Tech. Rep. Archives: SDM2012-74 ICD2012-42 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | A three-dimensional (3-D) vertical chain-cell-type phase-change memory (VCCPCM) for next-generation large-capacity storage was developed. The VCCPCM features formation of memory holes in multi-layered stacked gates by using a single mask and a memory array without a selection transistor. As a result of this configuration, the number of process steps for fabricating the VCCPCM is reduced. The excellent scalability of the VCCPCM’s new phase-change material makes it possible to reduce the cell size beyond the scaling limit of flash memory. In addition, a poly-silicon selection diode makes it possible to reduce the cell factor to 4F2. Consequently, relative cost of the VCCPCM compared to 3-D flash memory is reduced to 0.2. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | phase-change memory / chain-cell-type / 3-D / vertical / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 112, no. 169, SDM2012-74, pp. 59-63, Aug. 2012. | |
| Paper # | SDM2012-74 | |
| Date of Issue | 2012-07-26 (SDM, ICD) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2012-74 ICD2012-42 Link to ES Tech. Rep. Archives: SDM2012-74 ICD2012-42 |
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| Conference Information | |
| Committee | ICD SDM |
| Conference Date | 2012-08-02 - 2012-08-03 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Sapporo Center for Gender Equality, Sapporo, Hokkaido |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Low-power, low-voltage device and circuit technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2012-08-ICD-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Scalable 3-D vertical chain-cell-type phase-change memory with 4F2 poly-Si diodes |
| Sub Title (in English) | |
| Keyword(1) | phase-change memory |
| Keyword(2) | chain-cell-type |
| Keyword(3) | 3-D |
| Keyword(4) | vertical |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masaharu Kinoshita |
| 1st Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 2nd Author's Name | Yoshitaka Sasago |
| 2nd Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 3rd Author's Name | Hiroyuki Minemura |
| 3rd Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 4th Author's Name | Yumiko Anzai |
| 4th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 5th Author's Name | Mitsuharu Tai |
| 5th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 6th Author's Name | Yoshihisa Fujisaki |
| 6th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 7th Author's Name | Shuichi Kusaba |
| 7th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 8th Author's Name | Tadao Morimoto |
| 8th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 9th Author's Name | Takashi Takahama |
| 9th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 10th Author's Name | Toshiyuki Mine |
| 10th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 11th Author's Name | Akio Shima |
| 11th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 12th Author's Name | Yoshiki Yonamoto |
| 12th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 13th Author's Name | Takashi Kobayashi |
| 13th Author's Affiliation | Hitachi, Ltd. (Hitachi) |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2012-08-02 15:55:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2012-74, ICD2012-42 |
| Volume (vol) | vol.112 |
| Number (no) | no.169(SDM), no.170(ICD) |
| Page | pp.59-63 |
| #Pages | 5 |
| Date of Issue | 2012-07-26 (SDM, ICD) |
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