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Paper Abstract and Keywords
Presentation 2012-11-16 13:05
Antireflective Characteristics of Functionally-Graded Fluoropolymer Thin Films Prepared by Vapor-Deposition Polymerization
Kazuo Senda (Micro Eng. Inc.), Tsuyoshi Matsuda, Takumi Kawanishi, Kuniaki Tanaka, Hiroaki Usui (Tokyo Univ. Agricul. & Technol.) OME2012-55 OPE2012-127
Abstract (in Japanese) (See Japanese page) 
(in English) Fluoropolymer thin films were prepared by the ion-assisted vapor deposition polymerization (IAD) of 2- (peruorohexyl) ethylacrylate (Rf-6) under Ar ion irradiation. The film characteristics were largely inuenced by the ion acceleration voltage Va. With increasing Va, the adhesion strength between the film and the substrate was improved, while the surface energy increased, and the refractive index increased. With a purpose to realize all the features of high adhesion strength, low surface energy and low optical receptivity, a functionally-graded film was prepared by varying Va from 300 to 0 V continually in the course of film growth. As a consequence, an antireflective coating having good adhesion and low surface energy was obtained. The optical receptivity of a glass substrate was reduced from 4.9% to 0.55% at a wavelength of 400 nm by depositing single-layer of the functionally graded fuoropolymer film. The surface energy of this film was 8.5 mJ/m2.
Keyword (in Japanese) (See Japanese page) 
(in English) Ion-assisted deposition / Deposition polymerization / Fluoropolymer / Adhesion / Antireflection / Graded function / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 295, OME2012-55, pp. 1-5, Nov. 2012.
Paper # OME2012-55 
Date of Issue 2012-11-09 (OME, OPE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF OME2012-55 OPE2012-127

Conference Information
Committee OME OPE  
Conference Date 2012-11-16 - 2012-11-16 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To OME 
Conference Code 2012-11-OME-OPE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Antireflective Characteristics of Functionally-Graded Fluoropolymer Thin Films Prepared by Vapor-Deposition Polymerization 
Sub Title (in English)  
Keyword(1) Ion-assisted deposition  
Keyword(2) Deposition polymerization  
Keyword(3) Fluoropolymer  
Keyword(4) Adhesion  
Keyword(5) Antireflection  
Keyword(6) Graded function  
Keyword(7)  
Keyword(8)  
1st Author's Name Kazuo Senda  
1st Author's Affiliation Micro Engineering Inc. (Micro Eng. Inc.)
2nd Author's Name Tsuyoshi Matsuda  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
3rd Author's Name Takumi Kawanishi  
3rd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
4th Author's Name Kuniaki Tanaka  
4th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
5th Author's Name Hiroaki Usui  
5th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. Agricul. & Technol.)
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Speaker Author-1 
Date Time 2012-11-16 13:05:00 
Presentation Time 25 minutes 
Registration for OME 
Paper # OME2012-55, OPE2012-127 
Volume (vol) vol.112 
Number (no) no.295(OME), no.296(OPE) 
Page pp.1-5 
#Pages 5 
Date of Issue 2012-11-09 (OME, OPE) 

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