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Paper Abstract and Keywords
Presentation 2012-11-19 15:55
Spindt-emitter fabrication using sputtering deposition
Tomoya Yoshida, Masayoshi Nagao, Nobuko Koda, Takashi Nishi (AIST), Takeo Nakano (Seikei Univ.) ED2012-58
Abstract (in Japanese) (See Japanese page) 
(in English) A novel fabrication method of Spindt-type field emitter array will be presented. In our method, a double-layered photoresist is used as a parting layer, and high-power impulse magnetron sputtering is used instead of e-beam evaporator for emitter-cone formation. The etch-back method is adopted to form the multi-gate electrodes on each emitter cone. Using our method, the production of large-sized FEA would be realized without e-beam evaporator process.
Keyword (in Japanese) (See Japanese page) 
(in English) Field emitter array / Spindt type FEA / High power impulse magnetron sputtering / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 303, ED2012-58, pp. 19-23, Nov. 2012.
Paper # ED2012-58 
Date of Issue 2012-11-12 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2012-58

Conference Information
Committee ED  
Conference Date 2012-11-19 - 2012-11-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Osaka Univ. Nakanoshima Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Electron tubes, vacuum nanoelectronics, and their related technologies 
Paper Information
Registration To ED 
Conference Code 2012-11-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Spindt-emitter fabrication using sputtering deposition 
Sub Title (in English)  
Keyword(1) Field emitter array  
Keyword(2) Spindt type FEA  
Keyword(3) High power impulse magnetron sputtering  
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1st Author's Name Tomoya Yoshida  
1st Author's Affiliation National Institute of Advanced Science and Technology (AIST)
2nd Author's Name Masayoshi Nagao  
2nd Author's Affiliation National Institute of Advanced Science and Technology (AIST)
3rd Author's Name Nobuko Koda  
3rd Author's Affiliation National Institute of Advanced Science and Technology (AIST)
4th Author's Name Takashi Nishi  
4th Author's Affiliation National Institute of Advanced Science and Technology (AIST)
5th Author's Name Takeo Nakano  
5th Author's Affiliation Seikei University (Seikei Univ.)
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Speaker Author-1 
Date Time 2012-11-19 15:55:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2012-58 
Volume (vol) vol.112 
Number (no) no.303 
Page pp.19-23 
#Pages 5 
Date of Issue 2012-11-12 (ED) 

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