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Paper Abstract and Keywords
Presentation 2013-02-04 10:05
Improved Thermal Conductivity by Vertical Graphene Contact Formation for Thermal TSV
Akio Kawabata, Mizuhisa Nihei, Tomo Murakam, Motonobu Sato, Naoki Yokoyama (AIST) SDM2012-150
Abstract (in Japanese) (See Japanese page) 
(in English) This paper reports the tailoring thermal conductivity of novel dense vertical and horizontal graphene (DVHG) structures, which we have previously discovered. By removing horizontal graphene layers, resulting in forming vertical graphene contacts to the electrode, we improved not only the thermal conductivity but also the electrical conductivity by a factor of 10 and 100, respectively. We found that the vertical graphene contact formation can be an important technology to realize high thermal conductivity for carbon-based thermal through-silicon-via (TSV).
Keyword (in Japanese) (See Japanese page) 
(in English) DVHG / graphene / TSV / contact / thermal conductivity / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 427, SDM2012-150, pp. 1-4, Feb. 2013.
Paper # SDM2012-150 
Date of Issue 2013-01-28 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2012-150

Conference Information
Committee SDM  
Conference Date 2013-02-04 - 2013-02-04 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2013-02-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Improved Thermal Conductivity by Vertical Graphene Contact Formation for Thermal TSV 
Sub Title (in English)  
Keyword(1) DVHG  
Keyword(2) graphene  
Keyword(3) TSV  
Keyword(4) contact  
Keyword(5) thermal conductivity  
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Keyword(7)  
Keyword(8)  
1st Author's Name Akio Kawabata  
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
2nd Author's Name Mizuhisa Nihei  
2nd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
3rd Author's Name Tomo Murakam  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Motonobu Sato  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Naoki Yokoyama  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2013-02-04 10:05:00 
Presentation Time 40 minutes 
Registration for SDM 
Paper # SDM2012-150 
Volume (vol) vol.112 
Number (no) no.427 
Page pp.1-4 
#Pages 4 
Date of Issue 2013-01-28 (SDM) 

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