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Paper Abstract and Keywords
Presentation 2013-07-18 11:25
Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation
Mitsuyoshi Kishihara (Okayama Pref. Univ.), Hideki Kido, Akinobu Yamaguchi, Yuichi Utsumi, Isao Ohta (Univ. of Hyogo) MW2013-64 OPE2013-33 EST2013-28 MWP2013-23
Abstract (in Japanese) (See Japanese page) 
(in English) This paper describes trial fabrication of a PTFE-filled waveguide for 180 GHz-band operation with the use of the SR (synchrotron radiation) direct etching process of PTFE, sputter deposition of metal, and electroplating. It has been reported that PTFE microstructures can be fabricated by the direct exposure to SR. In this paper, the fabrication procedure for the PTFE-filled waveguide is briefly reviewed and the trial fabrication of the straight and the mitered-bend sections for 180 GHz operation is attempted. A waveguide flange for the 180 GHz PTFE-filled waveguide is also fabricated in the same process. The measured frequency characteristics of the PTFE-filled waveguides are shown, and the propagation losses are evaluated using the measurement results of the PTFE-filled waveguides with different lengths.
Keyword (in Japanese) (See Japanese page) 
(in English) X-ray lithography / sputtering / waveguide components / dielectric loaded waveguides / / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 141, MW2013-64, pp. 103-108, July 2013.
Paper # MW2013-64 
Date of Issue 2013-07-11 (MW, OPE, EST, MWP) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MW2013-64 OPE2013-33 EST2013-28 MWP2013-23

Conference Information
Committee EST MWP OPE MW EMT IEE-EMT  
Conference Date 2013-07-18 - 2013-07-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Wakkanai Synthesis Cultural Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Microwave photonic technology etc. 
Paper Information
Registration To MW 
Conference Code 2013-07-EST-MWP-OPE-MW-EMT-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation 
Sub Title (in English)  
Keyword(1) X-ray lithography  
Keyword(2) sputtering  
Keyword(3) waveguide components  
Keyword(4) dielectric loaded waveguides  
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1st Author's Name Mitsuyoshi Kishihara  
1st Author's Affiliation Okayama Prefectural University (Okayama Pref. Univ.)
2nd Author's Name Hideki Kido  
2nd Author's Affiliation University of Hyogo (Univ. of Hyogo)
3rd Author's Name Akinobu Yamaguchi  
3rd Author's Affiliation University of Hyogo (Univ. of Hyogo)
4th Author's Name Yuichi Utsumi  
4th Author's Affiliation University of Hyogo (Univ. of Hyogo)
5th Author's Name Isao Ohta  
5th Author's Affiliation University of Hyogo (Univ. of Hyogo)
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Speaker Author-1 
Date Time 2013-07-18 11:25:00 
Presentation Time 25 minutes 
Registration for MW 
Paper # MW2013-64, OPE2013-33, EST2013-28, MWP2013-23 
Volume (vol) vol.113 
Number (no) no.141(MW), no.142(OPE), no.143(EST), no.144(MWP) 
Page pp.103-108 
#Pages 6 
Date of Issue 2013-07-11 (MW, OPE, EST, MWP) 

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