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Paper Abstract and Keywords
Presentation 2013-07-18 10:20
Electrostatic Analysis of Effective Permittivity for Microstructure
Takuichi Hirano, Jiro Hirokawa, Makoto Ando (Tokyo Inst. of Tech.) MW2013-50 OPE2013-19 EST2013-14 MWP2013-9
Abstract (in Japanese) (See Japanese page) 
(in English) The authors have proposed evaluation technique of effective material property for dummy metal fills, which is inevitable to use in CMOS process. The proposed methods were (1) method that analyze eigenmode of a unit-cell by assuming wave propagation problem, and (2) method that assume capacitor and inductor model for a unit-cell to extract effective material property. This report presents electrostatic analysis of effective permittivity for dummy metal fills used in CMOS chips in order to verify the proposed methods in the past and to propose quick evaluation method. The effective permittivity agreed very well with those calculated by proposed methods in the past.
Keyword (in Japanese) (See Japanese page) 
(in English) Microstructure / Dummy metal fills / CMOS / Electrostatic analysis / Effective permittivity / Laplace equation / Laplace equation /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 143, EST2013-14, pp. 13-18, July 2013.
Paper # EST2013-14 
Date of Issue 2013-07-11 (MW, OPE, EST, MWP) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MW2013-50 OPE2013-19 EST2013-14 MWP2013-9

Conference Information
Committee EST MWP OPE MW EMT IEE-EMT  
Conference Date 2013-07-18 - 2013-07-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Wakkanai Synthesis Cultural Center 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Microwave photonic technology etc. 
Paper Information
Registration To EST 
Conference Code 2013-07-EST-MWP-OPE-MW-EMT-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Electrostatic Analysis of Effective Permittivity for Microstructure 
Sub Title (in English)  
Keyword(1) Microstructure  
Keyword(2) Dummy metal fills  
Keyword(3) CMOS  
Keyword(4) Electrostatic analysis  
Keyword(5) Effective permittivity  
Keyword(6) Laplace equation  
Keyword(7) Laplace equation  
Keyword(8)  
1st Author's Name Takuichi Hirano  
1st Author's Affiliation Tokyo Institute of Technology (Tokyo Inst. of Tech.)
2nd Author's Name Jiro Hirokawa  
2nd Author's Affiliation Tokyo Institute of Technology (Tokyo Inst. of Tech.)
3rd Author's Name Makoto Ando  
3rd Author's Affiliation Tokyo Institute of Technology (Tokyo Inst. of Tech.)
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Speaker Author-1 
Date Time 2013-07-18 10:20:00 
Presentation Time 25 minutes 
Registration for EST 
Paper # MW2013-50, OPE2013-19, EST2013-14, MWP2013-9 
Volume (vol) vol.113 
Number (no) no.141(MW), no.142(OPE), no.143(EST), no.144(MWP) 
Page pp.13-18 
#Pages 6 
Date of Issue 2013-07-11 (MW, OPE, EST, MWP) 

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