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Paper Abstract and Keywords
Presentation 2013-11-28 13:20
Evaluations of Variations on Ring Oscillators from Plasma Induced Damage in Bulk and SOTB Processes
Ryo Kishida, Michitarou Yabuuchi, Azusa Oshima, Kazutoshi Kobayashi (Kyoto Inst. of Tech.) VLD2013-83 DC2013-49
Abstract (in Japanese) (See Japanese page) 
(in English) A degradation of reliability caused by plasma induced damage has become a significant concern with miniaturizing a device size.
In this paper, we measure frequencies of ring oscillators with an antenna structure on one stage.
We prepare bulk and SOTB (Silicon On Thin BOX) chips.
As a result, variations of oscillating frequency do not change by antenna structures.
But frequencies are decreased by plasma induced damage.
The damaged are relieved by connecting an antenna to a drain in bulk.
Perimeter lengths give more serious damage in SOTB than in bulk.
Keyword (in Japanese) (See Japanese page) 
(in English) Plasma Induced Damage / Variation / SOTB / Ring Oscillator / Frequency / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 320, VLD2013-83, pp. 159-164, Nov. 2013.
Paper # VLD2013-83 
Date of Issue 2013-11-20 (VLD, DC) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF VLD2013-83 DC2013-49

Conference Information
Committee VLD DC IPSJ-SLDM CPSY RECONF ICD CPM  
Conference Date 2013-11-27 - 2013-11-29 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Design Gaia 2013 -New Field of VLSI Design- 
Paper Information
Registration To VLD 
Conference Code 2013-11-VLD-DC-SLDM-CPSY-RECONF-ICD-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluations of Variations on Ring Oscillators from Plasma Induced Damage in Bulk and SOTB Processes 
Sub Title (in English)  
Keyword(1) Plasma Induced Damage  
Keyword(2) Variation  
Keyword(3) SOTB  
Keyword(4) Ring Oscillator  
Keyword(5) Frequency  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Ryo Kishida  
1st Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. of Tech.)
2nd Author's Name Michitarou Yabuuchi  
2nd Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. of Tech.)
3rd Author's Name Azusa Oshima  
3rd Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. of Tech.)
4th Author's Name Kazutoshi Kobayashi  
4th Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. of Tech.)
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Speaker Author-1 
Date Time 2013-11-28 13:20:00 
Presentation Time 25 minutes 
Registration for VLD 
Paper # VLD2013-83, DC2013-49 
Volume (vol) vol.113 
Number (no) no.320(VLD), no.321(DC) 
Page pp.159-164 
#Pages 6 
Date of Issue 2013-11-20 (VLD, DC) 

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