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Paper Abstract and Keywords
Presentation 2013-11-29 14:45
Growth of Connected Pillar AlN Buffer for AlGaN deep-UV LEDs
Shiro Toyoda (Saitama Univ./RIKEN), Hideki Hirayama (RIKEN), Norihiko Kamata (Saitama Univ.) ED2013-85 CPM2013-144 LQE2013-120
Abstract (in Japanese) (See Japanese page) 
(in English) A connected-pillar AlN buffer structure fabricated on sapphire substrate is considered to be quite effective for increasing efficiency of AlGaN based deep-ultraviolet (DUV) LEDs, because of improving internal quantum efficiency (IQE) due to reduced threading-dislocation density (TDD), and light-extraction efficiency (LEE). In this study, we demonstrated the fabrication of connected-pillar AlN structure buffer on patterned-sapphire substrates (PSS) by using an ‘NH3 pulsed flow multi-layer growth’ method and an epitaxial lateral overgrowth (ELO).
Keyword (in Japanese) (See Japanese page) 
(in English) DUV-LED / MOCVD / AlN / AlGaN / Connected pillar / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 331, LQE2013-120, pp. 95-100, Nov. 2013.
Paper # LQE2013-120 
Date of Issue 2013-11-21 (ED, CPM, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2013-85 CPM2013-144 LQE2013-120

Conference Information
Committee CPM LQE ED  
Conference Date 2013-11-28 - 2013-11-29 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Ｎｉｔｒide and Compound Semiconductor Devices 
Paper Information
Registration To LQE 
Conference Code 2013-11-CPM-LQE-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Growth of Connected Pillar AlN Buffer for AlGaN deep-UV LEDs 
Sub Title (in English)  
Keyword(1) DUV-LED  
Keyword(2) MOCVD  
Keyword(3) AlN  
Keyword(4) AlGaN  
Keyword(5) Connected pillar  
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Keyword(7)  
Keyword(8)  
1st Author's Name Shiro Toyoda  
1st Author's Affiliation Saitama University/RIKEN (Saitama Univ./RIKEN)
2nd Author's Name Hideki Hirayama  
2nd Author's Affiliation RIKEN (RIKEN)
3rd Author's Name Norihiko Kamata  
3rd Author's Affiliation Saitama University (Saitama Univ.)
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Speaker Author-1 
Date Time 2013-11-29 14:45:00 
Presentation Time 25 minutes 
Registration for LQE 
Paper # ED2013-85, CPM2013-144, LQE2013-120 
Volume (vol) vol.113 
Number (no) no.329(ED), no.330(CPM), no.331(LQE) 
Page pp.95-100 
#Pages 6 
Date of Issue 2013-11-21 (ED, CPM, LQE) 

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