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Paper Abstract and Keywords
Presentation 2013-12-13 16:20
Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation
Kazuki Watanabe, Masaki Yamaguchi, Hiroyuki Nishikawa (Shibaura Inst. of Tech.) SDM2013-130
Abstract (in Japanese) (See Japanese page) 
(in English) In this study, we performed examination to form a thick film with the thing which added Polyvinylpyrrolidone (PVP), in the bismuth titanate (Bi4Ti3O12) which was a lead-free ferroelectric materials. We examined the direct patterning with these materials by the proton beam irradiation. Promotion of the c-axis orientation and a crack suppressant effect by the stress-relaxation were confirmed by adding PVP 50% in organic source solution. And, we succeeded in revising a composition gap by 30% excess Bi atoms. In addition, we formed a dot and arbitrary shape micro-patterns to the BIT thick film, which applied these conditions by the micromachining using the proton beam.
Keyword (in Japanese) (See Japanese page) 
(in English) ferroelectric thin fIlm / micromachining / Prevention of cracking / PVP / bismuth titanate / proton beam writing / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 351, SDM2013-130, pp. 85-89, Dec. 2013.
Paper # SDM2013-130 
Date of Issue 2013-12-06 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2013-12-13 - 2013-12-13 
Place (in Japanese) (See Japanese page) 
Place (in English) NAIST 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Fabrication and Characterization of Si related materials 
Paper Information
Registration To SDM 
Conference Code 2013-12-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation 
Sub Title (in English)  
Keyword(1) ferroelectric thin fIlm  
Keyword(2) micromachining  
Keyword(3) Prevention of cracking  
Keyword(4) PVP  
Keyword(5) bismuth titanate  
Keyword(6) proton beam writing  
Keyword(7)  
Keyword(8)  
1st Author's Name Kazuki Watanabe  
1st Author's Affiliation Shibaura Institute of Techinology (Shibaura Inst. of Tech.)
2nd Author's Name Masaki Yamaguchi  
2nd Author's Affiliation Shibaura Institute of Techinology (Shibaura Inst. of Tech.)
3rd Author's Name Hiroyuki Nishikawa  
3rd Author's Affiliation Shibaura Institute of Techinology (Shibaura Inst. of Tech.)
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Speaker Author-1 
Date Time 2013-12-13 16:20:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2013-130 
Volume (vol) vol.113 
Number (no) no.351 
Page pp.85-89 
#Pages 5 
Date of Issue 2013-12-06 (SDM) 

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