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| Presentation | 2013-12-20 15:00 Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects JoonHyun Kang, Yuki Atsumi, Yusuke Hayashi, Junichi Suzuki, Yuki Kuno, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai (Tokyo Tech)  OPE2013-142 Link to ES Tech. Rep. Archives: OPE2013-142 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Silicon photonics for optical interconnects can further improve the signal transmission density by introducing multilayered structure. In this work, we used grating couplers with metal mirrors for the inter-layer connection in multi-layered a-Si:H waveguides. The coupling efficiency of 90%, which was around 3 times higher than that without metal mirrors, was estimated by 3D-FDTD simulation. Devices were fabricated by process temperatures below 300°C and the coupling efficiency of 83% was obtained for a device with the number of grating periods of 20. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Silicon Photonics / Amorphous silicon / Inter-layer coupling / Grating coupler / Metal mirror / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 113, no. 370, OPE2013-142, pp. 25-30, Dec. 2013. | |
| Paper # | OPE2013-142 | |
| Date of Issue | 2013-12-13 (OPE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | OPE2013-142 Link to ES Tech. Rep. Archives: OPE2013-142 |
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| Conference Information | |
| Committee | OPE |
| Conference Date | 2013-12-20 - 2013-12-20 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | OPE |
| Conference Code | 2013-12-OPE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metal mirror assisted grating couplers between multilayered waveguides toward 3D optical interconnects |
| Sub Title (in English) | |
| Keyword(1) | Silicon Photonics |
| Keyword(2) | Amorphous silicon |
| Keyword(3) | Inter-layer coupling |
| Keyword(4) | Grating coupler |
| Keyword(5) | Metal mirror |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | JoonHyun Kang |
| 1st Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 2nd Author's Name | Yuki Atsumi |
| 2nd Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 3rd Author's Name | Yusuke Hayashi |
| 3rd Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 4th Author's Name | Junichi Suzuki |
| 4th Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 5th Author's Name | Yuki Kuno |
| 5th Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 6th Author's Name | Tomohiro Amemiya |
| 6th Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 7th Author's Name | Nobuhiko Nishiyama |
| 7th Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
| 8th Author's Name | Shigehisa Arai |
| 8th Author's Affiliation | Tokyo Insitute of Technology (Tokyo Tech) |
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| Speaker | Author-1 |
| Date Time | 2013-12-20 15:00:00 |
| Presentation Time | 25 minutes |
| Registration for | OPE |
| Paper # | OPE2013-142 |
| Volume (vol) | vol.113 |
| Number (no) | no.370 |
| Page | pp.25-30 |
| #Pages | 6 |
| Date of Issue | 2013-12-13 (OPE) |
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