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Paper Abstract and Keywords
Presentation 2014-01-29 15:55
[Invited Talk] Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 μm Pixel Back-Illuminated CMOS Image Sensor
Takekazu Shinohara, Kazufumi Watanabe (Sony Semiconductor), Kazunobu Ohta (Sony), Hajime Nakayama (Sony Semiconductor), Takafumi Morikawa (Sony), Keiichi Ohno, Dai Sugimoto (Sony Semiconductor), Shingo Kadomura, Teruo Hirayama (Sony) SDM2013-146
Abstract (in Japanese) (See Japanese page) 
(in English) We propose two technologies, vertical transfer gate (VTG) and buried shielding metal (BSM), that can be applied to 1.20 μm pixel back-illuminated CMOS image sensor (BI-CIS). With the VTG and BSM, the new pixel design exhibited 60% higher saturation signals and 50% lower crosstalk at wide chief ray angle (CRA). Even though both technologies have a three-dimensional structure formed on Si substrate, our process technology enabled them to be applied without increasing white blemish count or dark current degradation.
Keyword (in Japanese) (See Japanese page) 
(in English) CMOS image sensor / Back-illuminated CIS / three-dimensional structure / saturation signals / crosstalk / VTG / BSM /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 420, SDM2013-146, pp. 47-50, Jan. 2014.
Paper # SDM2013-146 
Date of Issue 2014-01-22 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2014-01-29 - 2014-01-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2014-01-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Three-dimensional Structures for High Saturation Signals and Crosstalk Suppression in 1.20 μm Pixel Back-Illuminated CMOS Image Sensor 
Sub Title (in English)  
Keyword(1) CMOS image sensor  
Keyword(2) Back-illuminated CIS  
Keyword(3) three-dimensional structure  
Keyword(4) saturation signals  
Keyword(5) crosstalk  
Keyword(6) VTG  
Keyword(7) BSM  
Keyword(8)  
1st Author's Name Takekazu Shinohara  
1st Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
2nd Author's Name Kazufumi Watanabe  
2nd Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
3rd Author's Name Kazunobu Ohta  
3rd Author's Affiliation Sony Corporation (Sony)
4th Author's Name Hajime Nakayama  
4th Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
5th Author's Name Takafumi Morikawa  
5th Author's Affiliation Sony Corporation (Sony)
6th Author's Name Keiichi Ohno  
6th Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
7th Author's Name Dai Sugimoto  
7th Author's Affiliation Sony Semiconductor Corporation (Sony Semiconductor)
8th Author's Name Shingo Kadomura  
8th Author's Affiliation Sony Corporation (Sony)
9th Author's Name Teruo Hirayama  
9th Author's Affiliation Sony Corporation (Sony)
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Speaker Author-2 
Date Time 2014-01-29 15:55:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2013-146 
Volume (vol) vol.113 
Number (no) no.420 
Page pp.47-50 
#Pages 4 
Date of Issue 2014-01-22 (SDM) 

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