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Paper Abstract and Keywords
Presentation 2014-04-11 11:10
Photoconductivity of Si Films on glass after Blue Multi-Laser Diode Annealing
Charith Jayanada Koswaththage*, Satoshi Chinen, Kouya Sugihara, Tatsuya Okada, Takashi Noguchi (Uni. of the Ryukyus) SDM2014-15 OME2014-15
Abstract (in Japanese) (See Japanese page) 
(in English) Photoconductivity of BLDA applied Si film was examined for the aim of multi-functional optical sensor application of the Si film on glass. Photoconductivity was increased due to the formation of large grains with the increase of laser power from 4 to 6 W. Furthermore, Si film crystallized by laser irradiation has been subjected to low-temperature annealing at 450℃ for 1h in H2/N2 (4%) gas atmosphere. Photosensitivity ratio of 94 (σphoto/σdark) was obtained under white light of 100 mW/cm2 in Si film of BLDA after irradiation at 6 W. It is considered light sensitivity was improved by the decrease of defects density in the Si film. The crystallization by BLDA is promising for application to the optical sensor of a multi-function system on panel is suggested from these results.
Keyword (in Japanese) (See Japanese page) 
(in English) Silicon / Laser annealing / Crystallization / Photoconductive characteristic / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 1, SDM2014-15, pp. 63-65, April 2014.
Paper # SDM2014-15 
Date of Issue 2014-04-03 (SDM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM OME  
Conference Date 2014-04-10 - 2014-04-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa-Ken-Seinen-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Advanced Thin-Film Devices (Si, Compound, Organic) and Related Topics 
Paper Information
Registration To SDM 
Conference Code 2014-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Photoconductivity of Si Films on glass after Blue Multi-Laser Diode Annealing 
Sub Title (in English)  
Keyword(1) Silicon  
Keyword(2) Laser annealing  
Keyword(3) Crystallization  
Keyword(4) Photoconductive characteristic  
Keyword(5)  
Keyword(6)  
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1st Author's Name Charith Jayanada Koswaththage*  
1st Author's Affiliation University of the Ryukyus (Uni. of the Ryukyus)
2nd Author's Name Satoshi Chinen  
2nd Author's Affiliation University of the Ryukyus (Uni. of the Ryukyus)
3rd Author's Name Kouya Sugihara  
3rd Author's Affiliation University of the Ryukyus (Uni. of the Ryukyus)
4th Author's Name Tatsuya Okada  
4th Author's Affiliation University of the Ryukyus (Uni. of the Ryukyus)
5th Author's Name Takashi Noguchi  
5th Author's Affiliation University of the Ryukyus (Uni. of the Ryukyus)
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Speaker Author-1 
Date Time 2014-04-11 11:10:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2014-15, OME2014-15 
Volume (vol) vol.114 
Number (no) no.1(SDM), no.2(OME) 
Page pp.63-65 
#Pages 3 
Date of Issue 2014-04-03 (SDM, OME) 

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