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Paper Abstract and Keywords
Presentation 2014-05-29 09:00
Investigation of laser scribing in fabrication of nitride-based LEDs for improvement of light-absorptive
Shun Hanai (Meijo Univ.), Atsushi Suzuki, Tsukasa Kitano (ELSEED), Daisuke Iida, Takahisa Kato, Tetsuya Takeuchi, Motoaki Iwaya, Satoshi Kamiyama, Isamu Akasaki (Meijo Univ.) ED2014-31 CPM2014-14 SDM2014-29
Abstract (in Japanese) (See Japanese page) 
(in English) For reduction of a manufacturing cost of the light-emitting-diode (LED), it is necessary to reduce the distance of individual devices. Laser scribing method is suitable to break wafer into narrow chips, and it enables precise and high throughput production. However, on the side wall of the laser scribed grooves, aluminum-rich amorphous oxide product, which causes the light absorption loss, is formed, after the irradiation of the laser beam. To solve this problem, we propose a new LED fabrication procedure. As a result of the new process, 25% improvement of the light output in a flip chip type blue LED was obtained.
Keyword (in Japanese) (See Japanese page) 
(in English) Nitride-Based LED / laser process / light extraction efficiency / hot phosphoric acid / amorphous oxide / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 57, CPM2014-14, pp. 65-68, May 2014.
Paper # CPM2014-14 
Date of Issue 2014-05-21 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2014-31 CPM2014-14 SDM2014-29

Conference Information
Committee CPM ED SDM  
Conference Date 2014-05-28 - 2014-05-29 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2014-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Investigation of laser scribing in fabrication of nitride-based LEDs for improvement of light-absorptive 
Sub Title (in English)  
Keyword(1) Nitride-Based LED  
Keyword(2) laser process  
Keyword(3) light extraction efficiency  
Keyword(4) hot phosphoric acid  
Keyword(5) amorphous oxide  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Shun Hanai  
1st Author's Affiliation Meijo University (Meijo Univ.)
2nd Author's Name Atsushi Suzuki  
2nd Author's Affiliation ELSEED Corporation (ELSEED)
3rd Author's Name Tsukasa Kitano  
3rd Author's Affiliation ELSEED Corporation (ELSEED)
4th Author's Name Daisuke Iida  
4th Author's Affiliation Meijo University (Meijo Univ.)
5th Author's Name Takahisa Kato  
5th Author's Affiliation Meijo University (Meijo Univ.)
6th Author's Name Tetsuya Takeuchi  
6th Author's Affiliation Meijo University (Meijo Univ.)
7th Author's Name Motoaki Iwaya  
7th Author's Affiliation Meijo University (Meijo Univ.)
8th Author's Name Satoshi Kamiyama  
8th Author's Affiliation Meijo University (Meijo Univ.)
9th Author's Name Isamu Akasaki  
9th Author's Affiliation Meijo University (Meijo Univ.)
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Speaker Author-1 
Date Time 2014-05-29 09:00:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper # ED2014-31, CPM2014-14, SDM2014-29 
Volume (vol) vol.114 
Number (no) no.56(ED), no.57(CPM), no.58(SDM) 
Page pp.65-68 
#Pages 4 
Date of Issue 2014-05-21 (ED, CPM, SDM) 

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