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Paper Abstract and Keywords
Presentation 2014-07-11 11:15
Estimation of parylene-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor
Yoshihiro Masuya, Kazuhiro Takahashi, Ryo Ozawa, Makoto Ishida, Kazuaki Sawada (Toyohashi Univ.of Tech) ED2014-52
Abstract (in Japanese) (See Japanese page) 
(in English) We have recently developed a surface stress sensor based on a MEMS Fabry-Perot interferometer integrated with a photodiode, which utilizes the nonlinear optical transmittance change in the Fabry-Perot interference to enhance the sensitivity of the surface stress. Parylene-C was used as a deformable membrane in the sensor because of negligible residual stress and low Young’s modulus of 2.8 GPa, which provides a large deformation with respect to molecular adsorption. After immobilization of 2-pg anti-BSA on the Fabry–Perot sensor, we measured about 50 nm deformation by optical surface profiler and reflection spectrum.
Keyword (in Japanese) (See Japanese page) 
(in English) MEMS Fabry–Perot interferometer / biosensor / label-free / surface-stress / protein / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 133, ED2014-52, pp. 39-43, July 2014.
Paper # ED2014-52 
Date of Issue 2014-07-03 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2014-52

Conference Information
Committee ED  
Conference Date 2014-07-10 - 2014-07-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Toyohashi Univ. of Tech. VBL 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Sensing Devices, MEMS, etc 
Paper Information
Registration To ED 
Conference Code 2014-07-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Estimation of parylene-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor 
Sub Title (in English)  
Keyword(1) MEMS Fabry–Perot interferometer  
Keyword(2) biosensor  
Keyword(3) label-free  
Keyword(4) surface-stress  
Keyword(5) protein  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Yoshihiro Masuya  
1st Author's Affiliation Toyohashi University of Technology (Toyohashi Univ.of Tech)
2nd Author's Name Kazuhiro Takahashi  
2nd Author's Affiliation Toyohashi University of Technology (Toyohashi Univ.of Tech)
3rd Author's Name Ryo Ozawa  
3rd Author's Affiliation Toyohashi University of Technology (Toyohashi Univ.of Tech)
4th Author's Name Makoto Ishida  
4th Author's Affiliation Toyohashi University of Technology (Toyohashi Univ.of Tech)
5th Author's Name Kazuaki Sawada  
5th Author's Affiliation Toyohashi University of Technology (Toyohashi Univ.of Tech)
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Speaker Author-1 
Date Time 2014-07-11 11:15:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2014-52 
Volume (vol) vol.114 
Number (no) no.133 
Page pp.39-43 
#Pages 5 
Date of Issue 2014-07-03 (ED) 

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