Information: Join today and make your research activities more affordable! Technical workshop participation fees and annual registration fees are available at member rates.
Notice: [Important] Announcement of Changes to Registration Fee Payment and Manuscript Upload Procedures for IEICE Technical Meetings
IEICE Technical Committee Submission System
Conference Paper's Information		 Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2014-07-17 13:25
Fabrication of ultra-high density nanodot arrays with high coercivity based on analysis of initial deposition process
Hiroki Hagiwara, Siggi Wodarz, Tomohiro Otani, Daiki Nishiie (Waseda Univ.), Giovanni Zangari (UVA), Takayuki Homma (Waseda Univ.) MR2014-9
Abstract (in Japanese) (See Japanese page) 
(in English) We have attempted to fabricate ferromagnetic nanodot arrays for bit patterned media (BPM) by using electrochemical processes and lithography techniques. In this study, we fabricated hcp-Co80Pt20 and L10-FePt thin films and nanodot arrays onto hcp-Ru (002) / Si substrate and analyzed them. By using electron beam lithography with negative-type resist, electrodeposited Co-Pt nanodot arrays with 10 nm diameter and 25 nm pitch were uniformly fabricated. For controlling the initial deposition process, applied potential was changed during electrodeposition to surpress nucleation and promoting growth. As a result, the grain size was increased compared with the initial stage of the nucleation. The Fe-rich and Pt-rich multilayers were fabricated by pulse electrodeposition to enhance the phase transformation from fcc-Fe-Pt to L10 Fe-Pt. By annealing at 650 oC and 500 oC, the phase transformation from fcc-Fe-Pt to L10 Fe-Pt was observed and Fe-Pt films with perpendicular coercivity of 13.4 kOe and 10.0 kOe. In addition, Fe-Pt nanodot arrays were successfully fabricated into the patterns formed using UV-nanoimprint lithography with such pulse electrodeposition.
Keyword (in Japanese) (See Japanese page) 
(in English) BPM / Electrodeposition / Co-Pt / Fe-Pt / Electron Beam Lithography / UV-Nanoimprint Lithography / /  
Reference Info. IEICE Tech. Rep., vol. 114, July 2014.
Paper #  
Date of Issue 2014-07-10 (MR) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MR2014-9

Conference Information
Committee MRIS ITE-MMS  
Conference Date 2014-07-17 - 2014-07-17 
Place (in Japanese) (See Japanese page) 
Place (in English) Tokyo Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Solid State Memory, Media, etc. 
Paper Information
Registration To MRIS 
Conference Code 2014-07-MR-MMS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of ultra-high density nanodot arrays with high coercivity based on analysis of initial deposition process 
Sub Title (in English)  
Keyword(1) BPM  
Keyword(2) Electrodeposition  
Keyword(3) Co-Pt  
Keyword(4) Fe-Pt  
Keyword(5) Electron Beam Lithography  
Keyword(6) UV-Nanoimprint Lithography  
Keyword(7)  
Keyword(8)  
1st Author's Name Hiroki Hagiwara  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Siggi Wodarz  
2nd Author's Affiliation Waseda University (Waseda Univ.)
3rd Author's Name Tomohiro Otani  
3rd Author's Affiliation Waseda University (Waseda Univ.)
4th Author's Name Daiki Nishiie  
4th Author's Affiliation Waseda University (Waseda Univ.)
5th Author's Name Giovanni Zangari  
5th Author's Affiliation University of Virginia (UVA)
6th Author's Name Takayuki Homma  
6th Author's Affiliation Waseda University (Waseda Univ.)
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
21st Author's Name  
21st Author's Affiliation ()
22nd Author's Name  
22nd Author's Affiliation ()
23rd Author's Name  
23rd Author's Affiliation ()
24th Author's Name  
24th Author's Affiliation ()
25th Author's Name  
25th Author's Affiliation ()
26th Author's Name / /
26th Author's Affiliation ()
()
27th Author's Name / /
27th Author's Affiliation ()
()
28th Author's Name / /
28th Author's Affiliation ()
()
29th Author's Name / /
29th Author's Affiliation ()
()
30th Author's Name / /
30th Author's Affiliation ()
()
31st Author's Name / /
31st Author's Affiliation ()
()
32nd Author's Name / /
32nd Author's Affiliation ()
()
33rd Author's Name / /
33rd Author's Affiliation ()
()
34th Author's Name / /
34th Author's Affiliation ()
()
35th Author's Name / /
35th Author's Affiliation ()
()
36th Author's Name / /
36th Author's Affiliation ()
()
Speaker Author-1 
Date Time 2014-07-17 13:25:00 
Presentation Time 25 minutes 
Registration for MRIS 
Paper # MR2014-9 
Volume (vol) vol.114 
Number (no) no.140 
Page pp.7-10 
#Pages 4 
Date of Issue 2014-07-10 (MR) 

[Return to Top Page]

[Return to IEICE Web Page]
The Institute of Electronics, Information and Communication Engineers (IEICE), Japan