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Paper Abstract and Keywords
Presentation 2014-08-05 13:55
Tr variance evaluation induced by probing pressure and its stress extraction methodology in 28nm High-K and Metal Gate process
Takeshi Okagaki, Takumi Hasegawa, Hiroyuki Takashino, Masako Fujii, Atsushi Tsuda, Koji Shibutani, Yoshinori Deguchi, Miho Yokota, Kazunori Onozawa (Renesas) SDM2014-77 ICD2014-46
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
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Reference Info. IEICE Tech. Rep., vol. 114, no. 174, SDM2014-77, pp. 83-86, Aug. 2014.
Paper # SDM2014-77 
Date of Issue 2014-07-28 (SDM, ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee ICD SDM  
Conference Date 2014-08-04 - 2014-08-05 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ., Multimedia Education Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To SDM 
Conference Code 2014-08-ICD-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Tr variance evaluation induced by probing pressure and its stress extraction methodology in 28nm High-K and Metal Gate process 
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1st Author's Name Takeshi Okagaki  
1st Author's Affiliation Renesas Elec. Corp. (Renesas)
2nd Author's Name Takumi Hasegawa  
2nd Author's Affiliation Renesas Elec. Corp. (Renesas)
3rd Author's Name Hiroyuki Takashino  
3rd Author's Affiliation Renesas Elec. Corp. (Renesas)
4th Author's Name Masako Fujii  
4th Author's Affiliation Renesas Elec. Corp. (Renesas)
5th Author's Name Atsushi Tsuda  
5th Author's Affiliation Renesas Elec. Corp. (Renesas)
6th Author's Name Koji Shibutani  
6th Author's Affiliation Renesas Elec. Corp. (Renesas)
7th Author's Name Yoshinori Deguchi  
7th Author's Affiliation Renesas Elec. Corp. (Renesas)
8th Author's Name Miho Yokota  
8th Author's Affiliation Renesas Elec. Corp. (Renesas)
9th Author's Name Kazunori Onozawa  
9th Author's Affiliation Renesas Elec. Corp. (Renesas)
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Speaker Author-1 
Date Time 2014-08-05 13:55:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2014-77, ICD2014-46 
Volume (vol) vol.114 
Number (no) no.174(SDM), no.175(ICD) 
Page pp.83-86 
#Pages 4 
Date of Issue 2014-07-28 (SDM, ICD) 

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