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Paper Abstract and Keywords
Presentation 2014-09-04 14:20
Preparation of Plasma Nitridation Layer on SiC Surface and Examination of Its Thermal Stability
Yoshiyuki Akahane, Takuo Kanou, Kouya Ogino, Yuuta Kobayashi, Tomohiko Yamakami, Kiichi Kamimura (Shinshu Univ.) CPM2014-77 Link to ES Tech. Rep. Archives: CPM2014-77
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 114, no. 202, CPM2014-77, pp. 13-16, Sept. 2014.
Paper # CPM2014-77 
Date of Issue 2014-08-28 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2014-77 Link to ES Tech. Rep. Archives: CPM2014-77

Conference Information
Committee CPM  
Conference Date 2014-09-04 - 2014-09-05 
Place (in Japanese) (See Japanese page) 
Place (in English) The 100th Anniversary Hall, Yamagata University 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2014-09-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation of Plasma Nitridation Layer on SiC Surface and Examination of Its Thermal Stability 
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1st Author's Name Yoshiyuki Akahane  
1st Author's Affiliation Shinshu University (Shinshu Univ.)
2nd Author's Name Takuo Kanou  
2nd Author's Affiliation Shinshu University (Shinshu Univ.)
3rd Author's Name Kouya Ogino  
3rd Author's Affiliation Shinshu University (Shinshu Univ.)
4th Author's Name Yuuta Kobayashi  
4th Author's Affiliation Shinshu University (Shinshu Univ.)
5th Author's Name Tomohiko Yamakami  
5th Author's Affiliation Shinshu University (Shinshu Univ.)
6th Author's Name Kiichi Kamimura  
6th Author's Affiliation Shinshu University (Shinshu Univ.)
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Date Time 2014-09-04 14:20:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2014-77 
Volume (vol) vol.114 
Number (no) no.202 
Page pp.13-16 
#Pages
Date of Issue 2014-08-28 (CPM) 


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