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Paper Abstract and Keywords
Presentation 2014-10-15 14:05
Fabrication of MgB2 nanowire superconducting single-photon detector using Br2-N2 dry etching
Hiroyuki Shibata (NTT) SCE2014-36
Abstract (in Japanese) (See Japanese page) 
(in English) For the development of superconducting devices using MgB_2, it is necessary to develop the new nano fabrication process for the material. Here, we report the fabrication of meander pattern of MgB_2 with the line width of 76 nm by using Br_2-N_2 dry etching. The detector exhibits the capacity for detecting single photons at 405 nm even at 10 K.
Keyword (in Japanese) (See Japanese page) 
(in English) superconducting single-photon detector / MgB2 / nano fabrication / Br2 etching / SSPD / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 247, SCE2014-36, pp. 11-15, Oct. 2014.
Paper # SCE2014-36 
Date of Issue 2014-10-08 (SCE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SCE2014-36

Conference Information
Committee SCE  
Conference Date 2014-10-15 - 2014-10-16 
Place (in Japanese) (See Japanese page) 
Place (in English) Tohoku University, RIEC 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Superconducting sensing technologies and their applications, etc. 
Paper Information
Registration To SCE 
Conference Code 2014-10-SCE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of MgB2 nanowire superconducting single-photon detector using Br2-N2 dry etching 
Sub Title (in English)  
Keyword(1) superconducting single-photon detector  
Keyword(2) MgB2  
Keyword(3) nano fabrication  
Keyword(4) Br2 etching  
Keyword(5) SSPD  
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1st Author's Name Hiroyuki Shibata  
1st Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
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Speaker Author-1 
Date Time 2014-10-15 14:05:00 
Presentation Time 25 minutes 
Registration for SCE 
Paper # SCE2014-36 
Volume (vol) vol.114 
Number (no) no.247 
Page pp.11-15 
#Pages 5 
Date of Issue 2014-10-08 (SCE) 

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