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| Presentation | 2014-10-15 14:05 Fabrication of MgB2 nanowire superconducting single-photon detector using Br2-N2 dry etching Hiroyuki Shibata (NTT)  SCE2014-36 Link to ES Tech. Rep. Archives: SCE2014-36 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | For the development of superconducting devices using MgB_2, it is necessary to develop the new nano fabrication process for the material. Here, we report the fabrication of meander pattern of MgB_2 with the line width of 76 nm by using Br_2-N_2 dry etching. The detector exhibits the capacity for detecting single photons at 405 nm even at 10 K. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | superconducting single-photon detector / MgB2 / nano fabrication / Br2 etching / SSPD / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 114, no. 247, SCE2014-36, pp. 11-15, Oct. 2014. | |
| Paper # | SCE2014-36 | |
| Date of Issue | 2014-10-08 (SCE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SCE2014-36 Link to ES Tech. Rep. Archives: SCE2014-36 |
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| Conference Information | |
| Committee | SCE |
| Conference Date | 2014-10-15 - 2014-10-16 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tohoku University, RIEC |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Superconducting sensing technologies and their applications, etc. |
| Paper Information | |
| Registration To | SCE |
| Conference Code | 2014-10-SCE |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of MgB2 nanowire superconducting single-photon detector using Br2-N2 dry etching |
| Sub Title (in English) | |
| Keyword(1) | superconducting single-photon detector |
| Keyword(2) | MgB2 |
| Keyword(3) | nano fabrication |
| Keyword(4) | Br2 etching |
| Keyword(5) | SSPD |
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| Keyword(8) | |
| 1st Author's Name | Hiroyuki Shibata |
| 1st Author's Affiliation | Nippon Telegraph and Telephone Corporation (NTT) |
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| Speaker | Author-1 |
| Date Time | 2014-10-15 14:05:00 |
| Presentation Time | 25 minutes |
| Registration for | SCE |
| Paper # | SCE2014-36 |
| Volume (vol) | vol.114 |
| Number (no) | no.247 |
| Page | pp.11-15 |
| #Pages | 5 |
| Date of Issue | 2014-10-08 (SCE) |
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