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Paper Abstract and Keywords
Presentation 2014-10-24 14:20
The Development of Hot-Wall Chemical Vapor Deposition Equipment with Structural System for Laser Irradiation, and Preparation of Carbon Nanotubes
Daiki Kawaguchi, Yusaku Tsuda, Keisuke Yoshida, Tomoko Nagata, Nobuyuki Iwata, Hiroshi Yamamoto (Nihon Univ.) CPM2014-106
Abstract (in Japanese) (See Japanese page) 
(in English) We report the development of Hot-wall type chemical vapor Deposition (HW-CVD) equipment by which high temperature, 850 ºC~1000 ºC, growth of single-walled carbon nanotube (SWNT) is able to be carried out with free electron laser (FEL) irradiation. Heater is separated to two zones. One of them is for decomposition of carbon source, and the other one is for growth of SWNT. A vaporizer is used to stabilize the quantity of ethanol introduction as a carbon source. Using this system, we try to SWNT growth on SiO2/Si substrate with the same condition as that of the cold-wall type (CW-) CVD equipment. However, fibrous materials are not confirmed from the substrate surface image after CVD. G-Band, D-Band, and RBM are not confirmed from the Raman spectrum.
Keyword (in Japanese) (See Japanese page) 
(in English) Hot-Wall Type Chemical Vapor Deposition Equipment / Single Wall Nanotube / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 276, CPM2014-106, pp. 17-20, Oct. 2014.
Paper # CPM2014-106 
Date of Issue 2014-10-17 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee CPM  
Conference Date 2014-10-24 - 2014-10-25 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2014-10-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The Development of Hot-Wall Chemical Vapor Deposition Equipment with Structural System for Laser Irradiation, and Preparation of Carbon Nanotubes 
Sub Title (in English)  
Keyword(1) Hot-Wall Type Chemical Vapor Deposition Equipment  
Keyword(2) Single Wall Nanotube  
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1st Author's Name Daiki Kawaguchi  
1st Author's Affiliation Nihon University (Nihon Univ.)
2nd Author's Name Yusaku Tsuda  
2nd Author's Affiliation Nihon University (Nihon Univ.)
3rd Author's Name Keisuke Yoshida  
3rd Author's Affiliation Nihon University (Nihon Univ.)
4th Author's Name Tomoko Nagata  
4th Author's Affiliation Nihon University (Nihon Univ.)
5th Author's Name Nobuyuki Iwata  
5th Author's Affiliation Nihon University (Nihon Univ.)
6th Author's Name Hiroshi Yamamoto  
6th Author's Affiliation Nihon University (Nihon Univ.)
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Speaker Author-5 
Date Time 2014-10-24 14:20:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper # CPM2014-106 
Volume (vol) vol.114 
Number (no) no.276 
Page pp.17-20 
#Pages
Date of Issue 2014-10-17 (CPM) 


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