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| Presentation | 2014-11-28 13:15 Suppression in Current Collapse of Millimeter-Wave GaN-HEMT Using MSQ-Based Low-k Insulator Films Shiro Ozaki, Kozo Makiyama, Toshihiro Ohki, Yoichi Kamada, Masaru Sato, Yoshitaka Niida, Naoya Okamoto, Satoshi Masuda, Kazukiyo Joshin (Fujitsu)  ED2014-90 CPM2014-147 LQE2014-118 Link to ES Tech. Rep. Archives: ED2014-90 CPM2014-147 LQE2014-118 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have investigated the effect of moisture on current collapse of GaN high electron mobility transistor (GaN-HEMT) when using low dielectric constant (low-k) insulator films to reduce the parasitic capacitance of millimeter-wave amplifier monolithic microwave integrated circuits (MMICs). We clarified that current collapse is caused by moisture uptake through the low-k films. Moreover, the moisture resistance of conventional carbon-based low-k films such as benzocyclobutene (BCB) are insufficient to suppress current collapse because of hydrophilic surface. Therefore, we propose methyl silsesquioxane (MSQ)-based low-k films to improve the moisture resistance by focusing on their hydrophobic property due to a large amount of methyl groups. Appling MSQ in GaN-HEMT, the moisture resistance of low-k films was improved, and current collapse due to humidification was successfully reduced. So, improving the moisture resistance with hydrophobic low-k films has a key role in reducing current collapse of GaN-HEMT. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | GaN-HEMT / Millimeter-wave / Current collapse / Low-k insulator films / MSQ / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 114, no. 336, ED2014-90, pp. 81-84, Nov. 2014. | |
| Paper # | ED2014-90 | |
| Date of Issue | 2014-11-20 (ED, CPM, LQE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2014-90 CPM2014-147 LQE2014-118 Link to ES Tech. Rep. Archives: ED2014-90 CPM2014-147 LQE2014-118 |
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| Conference Information | |
| Committee | LQE ED CPM |
| Conference Date | 2014-11-27 - 2014-11-28 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2014-11-LQE-ED-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Suppression in Current Collapse of Millimeter-Wave GaN-HEMT Using MSQ-Based Low-k Insulator Films |
| Sub Title (in English) | |
| Keyword(1) | GaN-HEMT |
| Keyword(2) | Millimeter-wave |
| Keyword(3) | Current collapse |
| Keyword(4) | Low-k insulator films |
| Keyword(5) | MSQ |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Shiro Ozaki |
| 1st Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 2nd Author's Name | Kozo Makiyama |
| 2nd Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 3rd Author's Name | Toshihiro Ohki |
| 3rd Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 4th Author's Name | Yoichi Kamada |
| 4th Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 5th Author's Name | Masaru Sato |
| 5th Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 6th Author's Name | Yoshitaka Niida |
| 6th Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 7th Author's Name | Naoya Okamoto |
| 7th Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 8th Author's Name | Satoshi Masuda |
| 8th Author's Affiliation | Fujitsu Limited (Fujitsu) |
| 9th Author's Name | Kazukiyo Joshin |
| 9th Author's Affiliation | Fujitsu Limited (Fujitsu) |
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| Speaker | Author-1 |
| Date Time | 2014-11-28 13:15:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2014-90, CPM2014-147, LQE2014-118 |
| Volume (vol) | vol.114 |
| Number (no) | no.336(ED), no.337(CPM), no.338(LQE) |
| Page | pp.81-84 |
| #Pages | 4 |
| Date of Issue | 2014-11-20 (ED, CPM, LQE) |
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