| Paper Abstract and Keywords |
| Presentation |
2015-03-02 11:35
[Invited Talk]
Formation of Epitaxial Metal/Gemanium Contacts and Control of Electric Conduction Property at the Interface Osamu Nakatsuka, Yunsheng Deng, Akihiro Suzuki, Mitsuo Sakashita, Noriyuki Taoka, Shigeaki Zaima (Nagoya Univ.) SDM2014-165 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
We need to develop the control technology of the electronic property at metal/Ge interfaces for low-power and high-speed Ge electronic devices. In this study, we have examined the formation of epitaxial NiGe layers on Ge(001) and Ge(110) substrates and have investigated the electrical conduction property of NiGe/Ge Schottky contacts with various interface structures. We clarified the strong dependence of the Schottky barrier height on the crystalline structure of the NiGe/Ge interfaces. Also, we demonstrate the possibility that an epitaxial NiGe/Ge interface promises the alleviation of the Fermi level pining phenomenon and the control of the Schottky barrier height. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
germanium / metal/Semiconductor contact / epitaxial growth / germanide / Schottky barrier height / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 114, no. 469, SDM2014-165, pp. 17-22, March 2015. |
| Paper # |
SDM2014-165 |
| Date of Issue |
2015-02-23 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
SDM2014-165 |
| Conference Information |
| Committee |
SDM |
| Conference Date |
2015-03-02 - 2015-03-02 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
http://www.ieice.org/jpn/about/syozai.html |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2015-03-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
Formation of Epitaxial Metal/Gemanium Contacts and Control of Electric Conduction Property at the Interface |
| Sub Title (in English) |
|
| Keyword(1) |
germanium |
| Keyword(2) |
metal/Semiconductor contact |
| Keyword(3) |
epitaxial growth |
| Keyword(4) |
germanide |
| Keyword(5) |
Schottky barrier height |
| Keyword(6) |
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| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Osamu Nakatsuka |
| 1st Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
| 2nd Author's Name |
Yunsheng Deng |
| 2nd Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
| 3rd Author's Name |
Akihiro Suzuki |
| 3rd Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
| 4th Author's Name |
Mitsuo Sakashita |
| 4th Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
| 5th Author's Name |
Noriyuki Taoka |
| 5th Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
| 6th Author's Name |
Shigeaki Zaima |
| 6th Author's Affiliation |
Nagoya Univ. (Nagoya Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2015-03-02 11:35:00 |
| Presentation Time |
30 minutes |
| Registration for |
SDM |
| Paper # |
SDM2014-165 |
| Volume (vol) |
vol.114 |
| Number (no) |
no.469 |
| Page |
pp.17-22 |
| #Pages |
6 |
| Date of Issue |
2015-02-23 (SDM) |