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Paper Abstract and Keywords
Presentation 2015-05-28 13:25
Multilayer layer graphene synthesis by Microwave Surface Wave Plasma CVD, and high quality according to ultraviolet light shading
Susumu Ichimura, Hideo Uchida, Koichi Wakita (Chubu Univ.), Yasuhiko Hayashi (Okayama Univ.), Masayoshi Umeno (Chubu Univ.) ED2015-17 CPM2015-2 SDM2015-19
Abstract (in Japanese) (See Japanese page) 
(in English) This study is aimed at applying the graphene as biosensor and biomaterials.From the viewpoint of reliability and electrical conductivity, the multi layer graphene is preferred.On the other hand, the transmittance of graphene is an item to be emphasized.In this study, the transmittance T>80% and the sheet resistance Rs<200Ω / □ is defined as the target value.In the formation of graphene, we were conducting research in both thermal CVD method which is generally used and Microwave Surface Wave Plasma CVD method.Several problems arise when the multi layer graphene synthesized by Microwave Surface Wave Plasma CVD method.In this study, we focused on the defect to be generated during the synthesis. We have examined the following factors, ultraviolet light, carbon source, a carrier gas, the charged particle bombardment, the surface state of the growth substrate, etching gas, substrate temperature and heat treatment after growth.In the present study, it has been confirmed that the most adversely affect factor is ultraviolet light.
Keyword (in Japanese) (See Japanese page) 
(in English) Graphene / Microwave Surface Wave Plasma CVD / Ultraviolet light / Biosensor / Biomaterials / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 64, CPM2015-2, pp. 5-10, May 2015.
Paper # CPM2015-2 
Date of Issue 2015-05-21 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2015-17 CPM2015-2 SDM2015-19

Conference Information
Committee ED CPM SDM  
Conference Date 2015-05-28 - 2015-05-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Venture Business Laboratory, Toyohashi University of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) crystal growth、devices characterization , etc. 
Paper Information
Registration To CPM 
Conference Code 2015-05-ED-CPM-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Multilayer layer graphene synthesis by Microwave Surface Wave Plasma CVD, and high quality according to ultraviolet light shading 
Sub Title (in English)  
Keyword(1) Graphene  
Keyword(2) Microwave Surface Wave Plasma CVD  
Keyword(3) Ultraviolet light  
Keyword(4) Biosensor  
Keyword(5) Biomaterials  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Susumu Ichimura  
1st Author's Affiliation Chubu University (Chubu Univ.)
2nd Author's Name Hideo Uchida  
2nd Author's Affiliation Chubu University (Chubu Univ.)
3rd Author's Name Koichi Wakita  
3rd Author's Affiliation Chubu University (Chubu Univ.)
4th Author's Name Yasuhiko Hayashi  
4th Author's Affiliation Okayama University (Okayama Univ.)
5th Author's Name Masayoshi Umeno  
5th Author's Affiliation Chubu University (Chubu Univ.)
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Speaker Author-1 
Date Time 2015-05-28 13:25:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # ED2015-17, CPM2015-2, SDM2015-19 
Volume (vol) vol.115 
Number (no) no.63(ED), no.64(CPM), no.65(SDM) 
Page pp.5-10 
#Pages 6 
Date of Issue 2015-05-21 (ED, CPM, SDM) 

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