Paper Abstract and Keywords |
Presentation |
2015-07-24 14:05
Low Damage Dry Etching for Recessed Gate AlGaN/GaN-HEMTs Yuichi Minoura, Naoya Okamoto, Toshihiro Ohki, Shiro Ozaki, Kozo Makiyama, Yoichi Kamada, Keiji Watanabe (Fujitsu Labs.) ED2015-38 Link to ES Tech. Rep. Archives: ED2015-38 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 115, no. 156, ED2015-38, pp. 9-13, July 2015. |
Paper # |
ED2015-38 |
Date of Issue |
2015-07-17 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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ED2015-38 Link to ES Tech. Rep. Archives: ED2015-38 |
Conference Information |
Committee |
ED |
Conference Date |
2015-07-24 - 2015-07-25 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
IT Business Plaza Musashi 5F |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Semiconductor Processes and Devices |
Paper Information |
Registration To |
ED |
Conference Code |
2015-07-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Low Damage Dry Etching for Recessed Gate AlGaN/GaN-HEMTs |
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1st Author's Name |
Yuichi Minoura |
1st Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
2nd Author's Name |
Naoya Okamoto |
2nd Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
3rd Author's Name |
Toshihiro Ohki |
3rd Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
4th Author's Name |
Shiro Ozaki |
4th Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
5th Author's Name |
Kozo Makiyama |
5th Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
6th Author's Name |
Yoichi Kamada |
6th Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
7th Author's Name |
Keiji Watanabe |
7th Author's Affiliation |
Fujitsu Laboratories Ltd. (Fujitsu Labs.) |
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Speaker |
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Date Time |
2015-07-24 14:05:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2015-38 |
Volume (vol) |
vol.115 |
Number (no) |
no.156 |
Page |
pp.9-13 |
#Pages |
5 |
Date of Issue |
2015-07-17 (ED) |