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Paper Abstract and Keywords
Presentation 2015-08-24 10:20
Development of a compacted doubly nesting array in Narrow Scribe Line aimed at detecting soft failures of interconnect via
Hiroki Shinkawata, Nobuo Tsuboi (REL), Atsushi Tsuda (RSD), Shingo Sato (Kansai), Yasuo Yamaguchi (REL) SDM2015-58 ICD2015-27 Link to ES Tech. Rep. Archives: SDM2015-58 ICD2015-27
Abstract (in Japanese) (See Japanese page) 
(in English) We introduce a new addressable test structure array using for mass production stage which is compacted doubly nesting array into Narrow Scribe Line which named as High sensitivity-Screening and Detection-decoder test structure in Scribe line (HSD-S). Abnormally high resistance as a soft failure via was detected and located in a 40nm CMOS technology. We captured a soft failure bit which had a high resistance via exhibiting over 160 times larger one.
Keyword (in Japanese) (See Japanese page) 
(in English) Scribe line / array structure / soft failure / Back End Of Line / interconnect via / variability / yield /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 190, SDM2015-58, pp. 7-10, Aug. 2015.
Paper # SDM2015-58 
Date of Issue 2015-08-17 (SDM, ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Conference Information
Committee SDM ICD  
Conference Date 2015-08-24 - 2015-08-25 
Place (in Japanese) (See Japanese page) 
Place (in English) Kumamoto City 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Low voltage/low power techniques, novel devices, circuits, and applications 
Paper Information
Registration To SDM 
Conference Code 2015-08-SDM-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of a compacted doubly nesting array in Narrow Scribe Line aimed at detecting soft failures of interconnect via 
Sub Title (in English)  
Keyword(1) Scribe line  
Keyword(2) array structure  
Keyword(3) soft failure  
Keyword(4) Back End Of Line  
Keyword(5) interconnect via  
Keyword(6) variability  
Keyword(7) yield  
Keyword(8)  
1st Author's Name Hiroki Shinkawata  
1st Author's Affiliation Renesas Electronics Corporation (REL)
2nd Author's Name Nobuo Tsuboi  
2nd Author's Affiliation Renesas Electronics Corporation (REL)
3rd Author's Name Atsushi Tsuda  
3rd Author's Affiliation Renesas System Design Corporation (RSD)
4th Author's Name Shingo Sato  
4th Author's Affiliation Kansai University (Kansai)
5th Author's Name Yasuo Yamaguchi  
5th Author's Affiliation Renesas Electronics Corporation (REL)
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Speaker Author-1 
Date Time 2015-08-24 10:20:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2015-58, ICD2015-27 
Volume (vol) vol.115 
Number (no) no.190(SDM), no.191(ICD) 
Page pp.7-10 
#Pages
Date of Issue 2015-08-17 (SDM, ICD) 


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