Paper Abstract and Keywords |
Presentation |
2015-08-24 10:20
Development of a compacted doubly nesting array in Narrow Scribe Line aimed at detecting soft failures of interconnect via Hiroki Shinkawata, Nobuo Tsuboi (REL), Atsushi Tsuda (RSD), Shingo Sato (Kansai), Yasuo Yamaguchi (REL) SDM2015-58 ICD2015-27 Link to ES Tech. Rep. Archives: SDM2015-58 ICD2015-27 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We introduce a new addressable test structure array using for mass production stage which is compacted doubly nesting array into Narrow Scribe Line which named as High sensitivity-Screening and Detection-decoder test structure in Scribe line (HSD-S). Abnormally high resistance as a soft failure via was detected and located in a 40nm CMOS technology. We captured a soft failure bit which had a high resistance via exhibiting over 160 times larger one. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Scribe line / array structure / soft failure / Back End Of Line / interconnect via / variability / yield / |
Reference Info. |
IEICE Tech. Rep., vol. 115, no. 190, SDM2015-58, pp. 7-10, Aug. 2015. |
Paper # |
SDM2015-58 |
Date of Issue |
2015-08-17 (SDM, ICD) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SDM2015-58 ICD2015-27 Link to ES Tech. Rep. Archives: SDM2015-58 ICD2015-27 |
Conference Information |
Committee |
SDM ICD |
Conference Date |
2015-08-24 - 2015-08-25 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kumamoto City |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Low voltage/low power techniques, novel devices, circuits, and applications |
Paper Information |
Registration To |
SDM |
Conference Code |
2015-08-SDM-ICD |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Development of a compacted doubly nesting array in Narrow Scribe Line aimed at detecting soft failures of interconnect via |
Sub Title (in English) |
|
Keyword(1) |
Scribe line |
Keyword(2) |
array structure |
Keyword(3) |
soft failure |
Keyword(4) |
Back End Of Line |
Keyword(5) |
interconnect via |
Keyword(6) |
variability |
Keyword(7) |
yield |
Keyword(8) |
|
1st Author's Name |
Hiroki Shinkawata |
1st Author's Affiliation |
Renesas Electronics Corporation (REL) |
2nd Author's Name |
Nobuo Tsuboi |
2nd Author's Affiliation |
Renesas Electronics Corporation (REL) |
3rd Author's Name |
Atsushi Tsuda |
3rd Author's Affiliation |
Renesas System Design Corporation (RSD) |
4th Author's Name |
Shingo Sato |
4th Author's Affiliation |
Kansai University (Kansai) |
5th Author's Name |
Yasuo Yamaguchi |
5th Author's Affiliation |
Renesas Electronics Corporation (REL) |
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Speaker |
Author-1 |
Date Time |
2015-08-24 10:20:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
SDM2015-58, ICD2015-27 |
Volume (vol) |
vol.115 |
Number (no) |
no.190(SDM), no.191(ICD) |
Page |
pp.7-10 |
#Pages |
4 |
Date of Issue |
2015-08-17 (SDM, ICD) |
|