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Paper Abstract and Keywords
Presentation 2016-03-02 10:30
Self-Aligned Quadruple Patterning-Aware Three-Color Grid Routing with Different Color Net
Toshiyuki Hongo, Atsushi Takahashi (Tokyo Tech) VLD2015-135
Abstract (in Japanese) (See Japanese page) 
(in English) Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14 nm technology node.
In this paper, we propose a grid routing method using partially three colored grid, which enables us to generate routing pattern that can be manufactured by SAQP process.
Our proposed method is an extension of a grid routing method in which pin location of a net is restricted.
In our proposed method, nets with more general pin location are allowed and routed by modifying partially three colored grid locally.
An obtained routing pattern is guaranteed to be manufactured by SAQP process.
Keyword (in Japanese) (See Japanese page) 
(in English) SAQP / routing / bend constraint / pin locate / / / /  
Reference Info. IEICE Tech. Rep., vol. 115, no. 465, VLD2015-135, pp. 137-142, Feb. 2016.
Paper # VLD2015-135 
Date of Issue 2016-02-22 (VLD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF VLD2015-135

Conference Information
Committee VLD  
Conference Date 2016-02-29 - 2016-03-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To VLD 
Conference Code 2016-02-VLD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Self-Aligned Quadruple Patterning-Aware Three-Color Grid Routing with Different Color Net 
Sub Title (in English)  
Keyword(1) SAQP  
Keyword(2) routing  
Keyword(3) bend constraint  
Keyword(4) pin locate  
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1st Author's Name Toshiyuki Hongo  
1st Author's Affiliation Tokyo Institute of Technology (Tokyo Tech)
2nd Author's Name Atsushi Takahashi  
2nd Author's Affiliation Tokyo Institute of Technology (Tokyo Tech)
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Speaker Author-1 
Date Time 2016-03-02 10:30:00 
Presentation Time 25 minutes 
Registration for VLD 
Paper # VLD2015-135 
Volume (vol) vol.115 
Number (no) no.465 
Page pp.137-142 
#Pages 6 
Date of Issue 2016-02-22 (VLD) 

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