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Paper Abstract and Keywords
Presentation 2016-04-21 16:25
Room-temperature atomic layer deposition of TiO2 on nanoparticles
Ko Kikuchi, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad Arima, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ) ED2016-5
Abstract (in Japanese) (See Japanese page) 
(in English) Metal oxide modification on nanoparticles has attracted attention to achieve new surface functions on them. Room-temperature atomic layer deposition (ALD) of titanium dioxide (TiO2) on Au nanoparticles was developed using tetrakis(dimethylamino)titanium (TDMAT) and plasma-excited water vaper. To avoid the aggregation of nanoparticles during ALD, a rotating scraper as a mixer was was placed in the reaction chamber. Complete oxidation state of TiO2 formed on the Si substrate was confirmed. The growth rate was measured to be 0.25 nm/cycle at room temperature. TiO2 film formed by ALD was covered on the Au nanoparticles with a diameter of 100nm.
Keyword (in Japanese) (See Japanese page) 
(in English) ALD / nanoparticle / TiO2 / Plasma-excited water vapor / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 14, ED2016-5, pp. 17-20, April 2016.
Paper # ED2016-5 
Date of Issue 2016-04-14 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2016-5

Conference Information
Committee ED  
Conference Date 2016-04-21 - 2016-04-22 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2016-04-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Room-temperature atomic layer deposition of TiO2 on nanoparticles 
Sub Title (in English)  
Keyword(1) ALD  
Keyword(2) nanoparticle  
Keyword(3) TiO2  
Keyword(4) Plasma-excited water vapor  
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1st Author's Name Ko Kikuchi  
1st Author's Affiliation Yamagata University (Yamagata Univ)
2nd Author's Name Kensaku Kanomata  
2nd Author's Affiliation Yamagata University (Yamagata Univ)
3rd Author's Name Masanori Miura  
3rd Author's Affiliation Yamagata University (Yamagata Univ)
4th Author's Name Bashir Ahmmad Arima  
4th Author's Affiliation Yamagata University (Yamagata Univ)
5th Author's Name Shigeru Kubota  
5th Author's Affiliation Yamagata University (Yamagata Univ)
6th Author's Name Fumihiko Hirose  
6th Author's Affiliation Yamagata University (Yamagata Univ)
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Speaker Author-1 
Date Time 2016-04-21 16:25:00 
Presentation Time 20 minutes 
Registration for ED 
Paper # ED2016-5 
Volume (vol) vol.116 
Number (no) no.14 
Page pp.17-20 
#Pages 4 
Date of Issue 2016-04-14 (ED) 

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