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Paper Abstract and Keywords
Presentation 2016-05-19 13:00
Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique
Hayato Ishida, Makoto Ishida (Toyohashi Tech.), Kazuaki Sawada, Kazuhiro Takahashi (Toyohashi Tech./EIIRIS) ED2016-13 CPM2016-1 SDM2016-18
Abstract (in Japanese) (See Japanese page) 
(in English) Recent research on a technique for transferring a CVD graphene on any substrate has been actively conducted. In this work, for the application of the resonator device of graphene, we proposed a dry transfer technique with a simple and low temperature. As a result, we succeeded cavity fabrication of edge-clamped drum structure by transferring CVD single-layer graphene, the cavity size was achieved to be maximum diameter of 6 m and the minimum depth of 670 nm. We obtained Raman spectrum with 2D / G ratio of 1.88 and few D peak, which indicated that the edge-clamped drum structure of the high-quality single-layer graphene was achieved. Further, by observation of Raman spectrum, we experimentally demonstrated the usability of PMMA removal in liquid in the fabrication of edge-clamped drum structure using dry transfer with PMMA.
Keyword (in Japanese) (See Japanese page) 
(in English) NEMS / MEMS / graphene / dry transfer / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 50, SDM2016-18, pp. 1-4, May 2016.
Paper # SDM2016-18 
Date of Issue 2016-05-12 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2016-13 CPM2016-1 SDM2016-18

Conference Information
Committee CPM ED SDM  
Conference Date 2016-05-19 - 2016-05-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Shizuoka University, Hamamatsu campus (Joint Research Lab.) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) crystal growth、devices characterization , etc. 
Paper Information
Registration To SDM 
Conference Code 2016-05-CPM-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique 
Sub Title (in English)  
Keyword(1) NEMS  
Keyword(2) MEMS  
Keyword(3) graphene  
Keyword(4) dry transfer  
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1st Author's Name Hayato Ishida  
1st Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
2nd Author's Name Makoto Ishida  
2nd Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
3rd Author's Name Kazuaki Sawada  
3rd Author's Affiliation Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute (Toyohashi Tech./EIIRIS)
4th Author's Name Kazuhiro Takahashi  
4th Author's Affiliation Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute (Toyohashi Tech./EIIRIS)
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Speaker Author-1 
Date Time 2016-05-19 13:00:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # ED2016-13, CPM2016-1, SDM2016-18 
Volume (vol) vol.116 
Number (no) no.48(ED), no.49(CPM), no.50(SDM) 
Page pp.1-4 
#Pages 4 
Date of Issue 2016-05-12 (ED, CPM, SDM) 

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