| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2016-10-21 11:10 Photometric Stereo by SEM Image Utilizing Region Division Hiroki Matsuse, Gou Koutaki, Keiichi Uchimura (Kumamoto Univ.), Atsushi Miyamoto (Hitachi)  PRMU2016-100 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In this paper, we present a three-dimensional (3D) reconstruction method for semiconductor pattern using a scanning electron microscope (SEM). 3D reconstruction method for semiconductor pattern using SEM images by photometric stereo has been proposed several, however they have a problem that reconstruction shape is distorted due to shadows. Our proposed method divides processing image into three regions: foreground, background and middle, and sets up geometrical constraints for each region. As a result, our method restrains the shape distortion by shadows and compensates the shadow accurately. Through the application result of our method for the actual semiconductor pattern, this method indicates that perform a stable 3D reconstruction. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Scanning Electron Microscope (SEM) / Photometric Stereo / Region Division / Shadowing Compensation / Semiconductor Measurement / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 116, no. 259, PRMU2016-100, pp. 55-60, Oct. 2016. | |
| Paper # | PRMU2016-100 | |
| Date of Issue | 2016-10-13 (PRMU) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | PRMU2016-100 |
|
| Conference Information | |
| Committee | PRMU |
| Conference Date | 2016-10-20 - 2016-10-21 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | PRMU |
| Conference Code | 2016-10-PRMU |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Photometric Stereo by SEM Image Utilizing Region Division |
| Sub Title (in English) | |
| Keyword(1) | Scanning Electron Microscope (SEM) |
| Keyword(2) | Photometric Stereo |
| Keyword(3) | Region Division |
| Keyword(4) | Shadowing Compensation |
| Keyword(5) | Semiconductor Measurement |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hiroki Matsuse |
| 1st Author's Affiliation | Kumamoto University (Kumamoto Univ.) |
| 2nd Author's Name | Gou Koutaki |
| 2nd Author's Affiliation | Kumamoto University (Kumamoto Univ.) |
| 3rd Author's Name | Keiichi Uchimura |
| 3rd Author's Affiliation | Kumamoto University (Kumamoto Univ.) |
| 4th Author's Name | Atsushi Miyamoto |
| 4th Author's Affiliation | Hitachi Ltd. (Hitachi) |
| 5th Author's Name | |
| 5th Author's Affiliation | () |
| 6th Author's Name | |
| 6th Author's Affiliation | () |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2016-10-21 11:10:00 |
| Presentation Time | 30 minutes |
| Registration for | PRMU |
| Paper # | PRMU2016-100 |
| Volume (vol) | vol.116 |
| Number (no) | no.259 |
| Page | pp.55-60 |
| #Pages | 6 |
| Date of Issue | 2016-10-13 (PRMU) |
[Return to Top Page]