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Paper Abstract and Keywords
Presentation 2016-10-26 11:00
A verification of formation process of emitters with nano-protrusion fabricated by the field-induced oxygen etching
Minoru Wakamoto, Shigekazu Nagai, Tatsuo Iwata, Kazuo Kajiwara, Koichi Hata (MIe Univ.) ED2016-54
Abstract (in Japanese) (See Japanese page) 
(in English) Focused ion beam systems equipped with liquid metal ion source has serious problems which are pollutions of samples due to irradiated ions and a broadening of spot size of ion beams due to chromatic aberration. In order to overcome these problems, gas field ion sources (GFIS) with narrow energy distributions are required. We succeeded to prepared a nano-protrusion on a tungsten emitter with large-radius by the modified field-induced oxygen etching to obtain a higher angular current density dI/dΩ. In this study, we investigated the emitter shape and identified oxide during the oxygen etching by field ion microscopy, transmission electron microscopy and atom probe. These results suppose the overhang model we proposed.
Keyword (in Japanese) (See Japanese page) 
(in English) field ion microscope / field-induced oxygen etching / atom probe analysis / / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 268, ED2016-54, pp. 51-56, Oct. 2016.
Paper # ED2016-54 
Date of Issue 2016-10-18 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee ED  
Conference Date 2016-10-25 - 2016-10-26 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
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Paper Information
Registration To ED 
Conference Code 2016-10-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A verification of formation process of emitters with nano-protrusion fabricated by the field-induced oxygen etching 
Sub Title (in English)  
Keyword(1) field ion microscope  
Keyword(2) field-induced oxygen etching  
Keyword(3) atom probe analysis  
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1st Author's Name Minoru Wakamoto  
1st Author's Affiliation Mie University (MIe Univ.)
2nd Author's Name Shigekazu Nagai  
2nd Author's Affiliation Mie University (MIe Univ.)
3rd Author's Name Tatsuo Iwata  
3rd Author's Affiliation Mie University (MIe Univ.)
4th Author's Name Kazuo Kajiwara  
4th Author's Affiliation Mie University (MIe Univ.)
5th Author's Name Koichi Hata  
5th Author's Affiliation Mie University (MIe Univ.)
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Speaker Author-1 
Date Time 2016-10-26 11:00:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2016-54 
Volume (vol) vol.116 
Number (no) no.268 
Page pp.51-56 
#Pages 6 
Date of Issue 2016-10-18 (ED) 

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