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| Presentation | 2016-10-27 10:00 Effects of the oxidizing species on the interface of Al2O3 film by atomic layer deposition Masaya Saito, Tomoyuki Suwa, Akinobu Teramoto, Rihito Kuroda, Yasumasa Koda, Hisaya Sugita, Hidekazu Ishii, Yoshinobu Shiba, Yasuyuki Shirai, Shigetoshi Sugawa (Tohoku univ.), Marie Hayashi, Junichi Tsuchimoto (CANON ANELVA)  SDM2016-73 Link to ES Tech. Rep. Archives: SDM2016-73 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Al2O3 is a prospective high-dielectric material for the gate insulator film of the power devices and MIM (Metal-Insulator-Metal) capacitors. In the former study, it was confirmed that Al2O3 can be formed without oxidizing Al2O3/Si interface by ALD (Atomic Layer Deposition) at stage temperature of 75℃. However, in this case, fixed oxide charge increases because of low oxidation ability. PDP (Post Deposition Process) is an effective way to solve this problem. In this study, Al2O3 and Al2O3/substrate interface are evaluated by electrical characteristics, RBS (Rutherford Backscattering Spectroscopy) and HAXPES (Hard X-ray Photoelectron Spectroscopy) measurement when PDP by different oxidizing species are introduced. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Al2O3 / ALD / PDP / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 116, no. 270, SDM2016-73, pp. 27-30, Oct. 2016. | |
| Paper # | SDM2016-73 | |
| Date of Issue | 2016-10-19 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2016-73 Link to ES Tech. Rep. Archives: SDM2016-73 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2016-10-26 - 2016-10-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2016-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effects of the oxidizing species on the interface of Al2O3 film by atomic layer deposition |
| Sub Title (in English) | |
| Keyword(1) | Al2O3 |
| Keyword(2) | ALD |
| Keyword(3) | PDP |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masaya Saito |
| 1st Author's Affiliation | Tohoku University (Tohoku univ.) |
| 2nd Author's Name | Tomoyuki Suwa |
| 2nd Author's Affiliation | Tohoku University (Tohoku univ.) |
| 3rd Author's Name | Akinobu Teramoto |
| 3rd Author's Affiliation | Tohoku University (Tohoku univ.) |
| 4th Author's Name | Rihito Kuroda |
| 4th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 5th Author's Name | Yasumasa Koda |
| 5th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 6th Author's Name | Hisaya Sugita |
| 6th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 7th Author's Name | Hidekazu Ishii |
| 7th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 8th Author's Name | Yoshinobu Shiba |
| 8th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 9th Author's Name | Yasuyuki Shirai |
| 9th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 10th Author's Name | Shigetoshi Sugawa |
| 10th Author's Affiliation | Tohoku University (Tohoku univ.) |
| 11th Author's Name | Marie Hayashi |
| 11th Author's Affiliation | CANON ANELVA CORPORATION (CANON ANELVA) |
| 12th Author's Name | Junichi Tsuchimoto |
| 12th Author's Affiliation | CANON ANELVA CORPORATION (CANON ANELVA) |
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| 13th Author's Affiliation | () |
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| 14th Author's Affiliation | () |
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| 15th Author's Affiliation | () |
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| 16th Author's Affiliation | () |
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| 17th Author's Affiliation | () |
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| 18th Author's Affiliation | () |
| Speaker | 1 |
| Date Time | 2016-10-27 10:00:00 |
| Presentation Time | 25 |
| Registration for | SDM |
| Paper # | SDM2016-73 |
| Volume (vol) | 116 |
| Number (no) | no.270 |
| Page | pp.27-30 |
| #Pages | 4 |
| Date of Issue | 2016-10-19 (SDM) |
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