| Paper Abstract and Keywords |
| Presentation |
2017-01-30 15:30
[Invited Talk]
General relationship for cation and anion doping effects on ferroelectric HfO2 formation Xu Lun, Shibayama Shigehisa, Izukashi Kazutaka, Nishimura Tomonori, Yajima Takeaki (Univ. of Tokyo), Migita Shinji (AIST), Toriumi Akira (Univ. of Tokyo) SDM2016-137 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
This work discusses the general relationship for cation and anion doping effects on the HfO2 para-/ferroelectric transition, which will provide us a helpful instruction for precise HfO2 ferroelectricity design. In addition, ferroelectric N-doped HfO2 has been demonstrated as a gate dielectric film on an oxide semiconductor for ferroelectric field-effect transistors (FeFETs). |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
ferroelectric HfO2 / dopants / N doping / FeFETs / / / / |
| Reference Info. |
IEICE Tech. Rep., vol. 116, no. 448, SDM2016-137, pp. 29-32, Jan. 2017. |
| Paper # |
SDM2016-137 |
| Date of Issue |
2017-01-23 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
SDM2016-137 |
| Conference Information |
| Committee |
SDM |
| Conference Date |
2017-01-30 - 2017-01-30 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
|
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2017-01-SDM |
| Language |
English |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
General relationship for cation and anion doping effects on ferroelectric HfO2 formation |
| Sub Title (in English) |
|
| Keyword(1) |
ferroelectric HfO2 |
| Keyword(2) |
dopants |
| Keyword(3) |
N doping |
| Keyword(4) |
FeFETs |
| Keyword(5) |
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| 1st Author's Name |
Xu Lun |
| 1st Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
| 2nd Author's Name |
Shibayama Shigehisa |
| 2nd Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
| 3rd Author's Name |
Izukashi Kazutaka |
| 3rd Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
| 4th Author's Name |
Nishimura Tomonori |
| 4th Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
| 5th Author's Name |
Yajima Takeaki |
| 5th Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
| 6th Author's Name |
Migita Shinji |
| 6th Author's Affiliation |
National Institute of Advanced Industrial Science and Technology (AIST) |
| 7th Author's Name |
Toriumi Akira |
| 7th Author's Affiliation |
University of Tokyo (Univ. of Tokyo) |
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| Speaker |
Author-1 |
| Date Time |
2017-01-30 15:30:00 |
| Presentation Time |
30 minutes |
| Registration for |
SDM |
| Paper # |
SDM2016-137 |
| Volume (vol) |
vol.116 |
| Number (no) |
no.448 |
| Page |
pp.29-32 |
| #Pages |
4 |
| Date of Issue |
2017-01-23 (SDM) |