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Paper Abstract and Keywords
Presentation 2017-03-02 10:55
Acceleration of a Hotspot Detection Method Based on Approximate String Matching for LSI Mask Pattern Using Table Reference
Shuma Tamagawa, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi (Hirohima City Univ.) VLD2016-112
Abstract (in Japanese) (See Japanese page) 
(in English) In nanoscale LSI fabrication, there exists a pattern on the mask pattern, called a hotspot, which leads to a failure.
Hotspots are detected by optical simulation.
However, it takes very long time.
Therefore, some studies have been conducted to realize efficient hotspot candidate detection.
In an existing study, a hotspot candidate detection method based on approximate string search, which is a one-dimensional pattern matching technique, was proposed.
In this method, while more flexible hotspot detection compared to commonly used template matching can be expected, this method takes more time to calculate the edit distance matrix in approximate string search.
In this study, we improved the calculation speed of the edit distance matrix, by a combination of a table reference-based calculation of an element of the matrix, and a parallel calculation of multiple elements.
As a result of evaluation experiments, we confirmed that our method achieved about 1/11 calculation time, compared to the existing method.
Keyword (in Japanese) (See Japanese page) 
(in English) Hotspot / Optical simulation / Approximate string search / / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 478, VLD2016-112, pp. 61-66, March 2017.
Paper # VLD2016-112 
Date of Issue 2017-02-22 (VLD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF VLD2016-112

Conference Information
Committee VLD  
Conference Date 2017-03-01 - 2017-03-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To VLD 
Conference Code 2017-03-VLD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Acceleration of a Hotspot Detection Method Based on Approximate String Matching for LSI Mask Pattern Using Table Reference 
Sub Title (in English)  
Keyword(1) Hotspot  
Keyword(2) Optical simulation  
Keyword(3) Approximate string search  
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1st Author's Name Shuma Tamagawa  
1st Author's Affiliation Hiroshima City University (Hirohima City Univ.)
2nd Author's Name Masato Inagi  
2nd Author's Affiliation Hiroshima City University (Hirohima City Univ.)
3rd Author's Name Shinobu Nagayama  
3rd Author's Affiliation Hiroshima City University (Hirohima City Univ.)
4th Author's Name Shin'ichi Wakabayashi  
4th Author's Affiliation Hiroshima City University (Hirohima City Univ.)
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Speaker Author-1 
Date Time 2017-03-02 10:55:00 
Presentation Time 25 minutes 
Registration for VLD 
Paper # VLD2016-112 
Volume (vol) vol.116 
Number (no) no.478 
Page pp.61-66 
#Pages 6 
Date of Issue 2017-02-22 (VLD) 

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