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Paper Abstract and Keywords
Presentation 2017-03-02 15:50
[Invited Lecture] Accurate Evaluation Technique of Complex Permittivity for Low Permittivity Dielectric Films using a Cavity Resonator Method in 60 GHz band
Takashi Shimizu, Shunsuke Kojima, Yoshinori Kogami (Utsunomiya Univ.) MW2016-200 ICD2016-130 Link to ES Tech. Rep. Archives: MW2016-200 ICD2016-130
Abstract (in Japanese) (See Japanese page) 
(in English) In order to realize modern millimeter wave applications, the accurate value of complex permittivity of low permittivity dielec-tric films with excellent characteristics are needed by circuit designers and material developers. However, there are few ac-curate measurement methods for dielectric films in the millimeter wave region. In this paper, an accurate evaluation tech-nique for thin dielectric films using a novel V band cavity in 60 GHz band is proposed on the basis of a cavity resonator method. The novel V band cavity with small excitation holes, which does not affect the resonant electromagnetic fields, is designed and fabricated. The six kinds of thin dielectric film were measured by the proposed technique using the novel cavi-ty. The measured results and the uncertainty analysis validate the accuracy and the usefulness of the proposed method. Moreover, it was verified that this technique can evaluate thin samples with thicknesses of 10 m or more.
Keyword (in Japanese) (See Japanese page) 
(in English) Cavity resonator method / Complex permittivity / Low-loss dielectric materials / Millimeter-wave / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 486, MW2016-200, pp. 67-72, March 2017.
Paper # MW2016-200 
Date of Issue 2017-02-23 (MW, ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MW2016-200 ICD2016-130 Link to ES Tech. Rep. Archives: MW2016-200 ICD2016-130

Conference Information
Committee MW ICD  
Conference Date 2017-03-02 - 2017-03-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Okayama Prefectural Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Microwave Integrated Circuit / Microwave Technologies 
Paper Information
Registration To MW 
Conference Code 2017-03-MW-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Accurate Evaluation Technique of Complex Permittivity for Low Permittivity Dielectric Films using a Cavity Resonator Method in 60 GHz band 
Sub Title (in English)  
Keyword(1) Cavity resonator method  
Keyword(2) Complex permittivity  
Keyword(3) Low-loss dielectric materials  
Keyword(4) Millimeter-wave  
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1st Author's Name Takashi Shimizu  
1st Author's Affiliation Utsunomiya University (Utsunomiya Univ.)
2nd Author's Name Shunsuke Kojima  
2nd Author's Affiliation Utsunomiya University (Utsunomiya Univ.)
3rd Author's Name Yoshinori Kogami  
3rd Author's Affiliation Utsunomiya University (Utsunomiya Univ.)
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Speaker Author-1 
Date Time 2017-03-02 15:50:00 
Presentation Time 20 minutes 
Registration for MW 
Paper # MW2016-200, ICD2016-130 
Volume (vol) vol.116 
Number (no) no.486(MW), no.487(ICD) 
Page pp.67-72 
#Pages
Date of Issue 2017-02-23 (MW, ICD) 


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