| Paper Abstract and Keywords |
| Presentation |
2017-10-25 16:30
[Invited Talk]
A Study on the Device Characteristics of Pentacene-based OFET with HfO2 Gate Insulator Yasutaka Maeda, Yeyuan Liu, Mizuha Hiroki, Shun-ichiro Ohmi (Tokyo Tech.) SDM2017-54 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
The grain growth of a pentacene thin film, which is a well-known p-type organic semiconductor, is sensitive to underneath materials and deposition temperature. In this paper, the pentacene film deposited at 100oC on a HfO2 bottom-gate insulator, which is one of the most famous high-k materials, was investigated to reduce the operation voltage of OFETs. It was found that the grain size of a pentacene film was increased to 10 um, and it was larger than that on SiO2. Furthermore, a nitrogen-doped LaB6 interfacial layer deposited on an SiO2 gate insulator also increased the grain size of the pentacene film, and the device characteristics of the OFET improved. |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
pentacene / HfO2 / nitrogen-doped LaB6 / interface control / high temperature deposition / surface morphology / / |
| Reference Info. |
IEICE Tech. Rep., vol. 117, no. 260, SDM2017-54, pp. 25-30, Oct. 2017. |
| Paper # |
SDM2017-54 |
| Date of Issue |
2017-10-18 (SDM) |
| ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
SDM2017-54 |
| Conference Information |
| Committee |
SDM |
| Conference Date |
2017-10-25 - 2017-10-26 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Niche, Tohoku Univ. |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Process Science and New Process Technology |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2017-10-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
A Study on the Device Characteristics of Pentacene-based OFET with HfO2 Gate Insulator |
| Sub Title (in English) |
|
| Keyword(1) |
pentacene |
| Keyword(2) |
HfO2 |
| Keyword(3) |
nitrogen-doped LaB6 |
| Keyword(4) |
interface control |
| Keyword(5) |
high temperature deposition |
| Keyword(6) |
surface morphology |
| Keyword(7) |
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| Keyword(8) |
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| 1st Author's Name |
Yasutaka Maeda |
| 1st Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech.) |
| 2nd Author's Name |
Yeyuan Liu |
| 2nd Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech.) |
| 3rd Author's Name |
Mizuha Hiroki |
| 3rd Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech.) |
| 4th Author's Name |
Shun-ichiro Ohmi |
| 4th Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech.) |
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| Speaker |
Author-1 |
| Date Time |
2017-10-25 16:30:00 |
| Presentation Time |
50 minutes |
| Registration for |
SDM |
| Paper # |
SDM2017-54 |
| Volume (vol) |
vol.117 |
| Number (no) |
no.260 |
| Page |
pp.25-30 |
| #Pages |
6 |
| Date of Issue |
2017-10-18 (SDM) |