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Paper Abstract and Keywords
Presentation 2018-03-01 09:00
A Study of Lithography Hotspot Detection Method Based on Feature Vectors Considering Distances between Wires
Gaku Kataoka, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi (Hiroshima City Univ.) VLD2017-105
Abstract (in Japanese) (See Japanese page) 
(in English) In lithography, which is one of the LSI fabrication processes, a layout pattern with a high failure probability is called a hotspot. In machine-learning based hotspot detection methods, Density Based Layout Feature, which considers only the area of wires in each local region, is widely used. Meanwhile, as we can see from the fact that the distance between wires is checked in design rule checking, when it is smaller, the transferred patterns of wires tend to form short circuits with a higher probability. Thus, the distance between wires is possibly an important measure for hotspot detection. Therefore, in this study, we propose and evaluate a hotspot detection method that considers the distance between wires as a feature vector.
Keyword (in Japanese) (See Japanese page) 
(in English) lithography / hotspot / machine learning / detection accuracy / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 455, VLD2017-105, pp. 97-102, Feb. 2018.
Paper # VLD2017-105 
Date of Issue 2018-02-21 (VLD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF VLD2017-105

Conference Information
Committee VLD HWS  
Conference Date 2018-02-28 - 2018-03-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To VLD 
Conference Code 2018-02-VLD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A Study of Lithography Hotspot Detection Method Based on Feature Vectors Considering Distances between Wires 
Sub Title (in English)  
Keyword(1) lithography  
Keyword(2) hotspot  
Keyword(3) machine learning  
Keyword(4) detection accuracy  
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1st Author's Name Gaku Kataoka  
1st Author's Affiliation Hiroshima City University (Hiroshima City Univ.)
2nd Author's Name Masato Inagi  
2nd Author's Affiliation Hiroshima City University (Hiroshima City Univ.)
3rd Author's Name Shinobu Nagayama  
3rd Author's Affiliation Hiroshima City University (Hiroshima City Univ.)
4th Author's Name Shin'ichi Wakabayashi  
4th Author's Affiliation Hiroshima City University (Hiroshima City Univ.)
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Speaker Author-1 
Date Time 2018-03-01 09:00:00 
Presentation Time 25 minutes 
Registration for VLD 
Paper # VLD2017-105 
Volume (vol) vol.117 
Number (no) no.455 
Page pp.97-102 
#Pages 6 
Date of Issue 2018-02-21 (VLD) 

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