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Paper Abstract and Keywords
Presentation 2019-08-08 11:00
[Invited Talk] Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques
Yuki Furubayashi, Takashi Oshima, Yudai Kamada, Atsushi Isobe (Hitachi, Ltd.) SDM2019-43 ICD2019-8
Abstract (in Japanese) (See Japanese page) 
(in English) A fully integrated MEMS(Micro Electro Mechanical Systems) accelerometer with extremely low noise (22ng/√Hz) and sufficiently low power (17mW) was developed for emerging applications such as next-generation oil and gas exploration and infrastructure monitoring. It achieved 11x FoM and 1/9 noise level among state-of-the-art low-noise low-power MEMS accelerometers by applying a unique MEMS structure and noise reduction in the digital domain based on awareness of unfamiliar noise mechanisms. In this paper, as an application enabled by the noise performance, an example which has applied this sensor to the water-leakage detection is explained.
Keyword (in Japanese) (See Japanese page) 
(in English) Accelerometer / MEMS / Low power / Low noise / Oil and gas exploration / Infrastructure monitoring / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 162, ICD2019-8, pp. 35-40, Aug. 2019.
Paper # ICD2019-8 
Date of Issue 2019-07-31 (SDM, ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2019-43 ICD2019-8

Conference Information
Committee SDM ICD ITE-IST  
Conference Date 2019-08-07 - 2019-08-09 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ., Graduate School /Faculty of Information Science and 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications 
Paper Information
Registration To ICD 
Conference Code 2019-08-SDM-ICD-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques 
Sub Title (in English)  
Keyword(1) Accelerometer  
Keyword(2) MEMS  
Keyword(3) Low power  
Keyword(4) Low noise  
Keyword(5) Oil and gas exploration  
Keyword(6) Infrastructure monitoring  
Keyword(7)  
Keyword(8)  
1st Author's Name Yuki Furubayashi  
1st Author's Affiliation Hitachi, Ltd. (Hitachi, Ltd.)
2nd Author's Name Takashi Oshima  
2nd Author's Affiliation Hitachi, Ltd. (Hitachi, Ltd.)
3rd Author's Name Yudai Kamada  
3rd Author's Affiliation Hitachi, Ltd. (Hitachi, Ltd.)
4th Author's Name Atsushi Isobe  
4th Author's Affiliation Hitachi, Ltd. (Hitachi, Ltd.)
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Speaker Author-1 
Date Time 2019-08-08 11:00:00 
Presentation Time 45 minutes 
Registration for ICD 
Paper # SDM2019-43, ICD2019-8 
Volume (vol) vol.119 
Number (no) no.161(SDM), no.162(ICD) 
Page pp.35-40 
#Pages 6 
Date of Issue 2019-07-31 (SDM, ICD) 

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