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Paper Abstract and Keywords
Presentation 2019-11-22 12:45
Progress of UVC-LEDs using DC sputter AlN templates
Yosuke Mogami (RIKEN/Saitama Univ.), Atsushi Osawa, Kazuto Ozaki, Yukitake Tanioka, Atsushi Maeoka (SCREEN), Yuri Itokazu, Syunsuke Kuwaba (RIKEN/Saitama Univ.), Masafumi Jo, Noritoshi Maeda (RIKEN), Hiroyuki Yaguchi (Saitama Univ.), Hideki Hirayama (RIKEN) ED2019-53 CPM2019-72 LQE2019-96
Abstract (in Japanese) (See Japanese page) 
(in English) A high-quality AlN substrate or template is required to realize AlGaN-based UVC-LEDs which has a wide range of applications such as sterilization, water purification and in medical field. Recently, the combination of RF sputtering and high temperature annealing technique has paved the way to the realization of low-cost, high-quality AlN templates on sapphire substrate[1]. We are demonstrating the possibility of DC sputtering technique for fabricating an AlN template with high throughput and excellent productivity. In this report, we fabricated a DC sputtered AlN template that achieves both low threading dislocation density and high surface flatness, and realized a UVC-LED with an external quantum efficiency of 1.4%.
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Reference Info. IEICE Tech. Rep., vol. 119, no. 304, LQE2019-96, pp. 85-88, Nov. 2019.
Paper # LQE2019-96 
Date of Issue 2019-11-14 (ED, CPM, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2019-53 CPM2019-72 LQE2019-96

Conference Information
Committee CPM LQE ED  
Conference Date 2019-11-21 - 2019-11-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Shizuoka Univ. (Hamamatsu) 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Nitride Semiconductor Devices, Materials, Related Technologies 
Paper Information
Registration To LQE 
Conference Code 2019-11-CPM-LQE-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Progress of UVC-LEDs using DC sputter AlN templates 
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1st Author's Name Yosuke Mogami  
1st Author's Affiliation The Institute of Physical and Chemical Research/Saitama University (RIKEN/Saitama Univ.)
2nd Author's Name Atsushi Osawa  
2nd Author's Affiliation SCREEN Finetech Solutions Co., Ltd. (SCREEN)
3rd Author's Name Kazuto Ozaki  
3rd Author's Affiliation SCREEN Finetech Solutions Co., Ltd. (SCREEN)
4th Author's Name Yukitake Tanioka  
4th Author's Affiliation SCREEN Finetech Solutions Co., Ltd. (SCREEN)
5th Author's Name Atsushi Maeoka  
5th Author's Affiliation SCREEN Finetech Solutions Co., Ltd. (SCREEN)
6th Author's Name Yuri Itokazu  
6th Author's Affiliation The Institute of Physical and Chemical Research/Saitama University (RIKEN/Saitama Univ.)
7th Author's Name Syunsuke Kuwaba  
7th Author's Affiliation The Institute of Physical and Chemical Research/Saitama University (RIKEN/Saitama Univ.)
8th Author's Name Masafumi Jo  
8th Author's Affiliation The Institute of Physical and Chemical Research (RIKEN)
9th Author's Name Noritoshi Maeda  
9th Author's Affiliation The Institute of Physical and Chemical Research (RIKEN)
10th Author's Name Hiroyuki Yaguchi  
10th Author's Affiliation Saitama University (Saitama Univ.)
11th Author's Name Hideki Hirayama  
11th Author's Affiliation The Institute of Physical and Chemical Research (RIKEN)
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Speaker Author-1 
Date Time 2019-11-22 12:45:00 
Presentation Time 20 minutes 
Registration for LQE 
Paper # ED2019-53, CPM2019-72, LQE2019-96 
Volume (vol) vol.119 
Number (no) no.302(ED), no.303(CPM), no.304(LQE) 
Page pp.85-88 
#Pages 4 
Date of Issue 2019-11-14 (ED, CPM, LQE) 

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