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Paper Abstract and Keywords
Presentation 2020-11-30 14:55
Analysis for Degraded MLCC Using Voltage Contrast Method in SEM
Akira Saito (Murata) R2020-27
Abstract (in Japanese) (See Japanese page) 
(in English) To ensure the reliability of multi-layer ceramic capacitor (MLCC) while its miniaturization is accelerating, it is necessary to understand the degradation mechanism of BaTiO3 dielectric under high temperature and high electric field. At the first stage of the degradation, oxygen vacancies move towards a cathode side in BaTiO3 dielectric, and electric field concentration is formed near cathode. At the second stage, electric field concentration is formed near cathode and anode by increase in electric current. At the third stage, electric field concentration is formed near anode by further electric current. By using the voltage contrast method in SEM that can be observed at a higher magnification than KFM, it has become possible to measure the potential change of individual particles and grain boundaries near the anode of the degraded MLCC.
Keyword (in Japanese) (See Japanese page) 
(in English) MLCC / Insulation degradation / Voltage cintrast / Oxygen vacancy / Electric field concentration / Schottky barrier / /  
Reference Info. IEICE Tech. Rep., vol. 120, no. 267, R2020-27, pp. 21-24, Nov. 2020.
Paper # R2020-27 
Date of Issue 2020-11-23 (R) 
ISSN Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee R  
Conference Date 2020-11-30 - 2020-11-30 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Reliability of semiconductor and electronic devices, Reliability general 
Paper Information
Registration To R 
Conference Code 2020-11-R 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Analysis for Degraded MLCC Using Voltage Contrast Method in SEM 
Sub Title (in English)  
Keyword(1) MLCC  
Keyword(2) Insulation degradation  
Keyword(3) Voltage cintrast  
Keyword(4) Oxygen vacancy  
Keyword(5) Electric field concentration  
Keyword(6) Schottky barrier  
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Keyword(8)  
1st Author's Name Akira Saito  
1st Author's Affiliation Murata manufacturing Co., Ltd. (Murata)
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Speaker Author-1 
Date Time 2020-11-30 14:55:00 
Presentation Time 25 minutes 
Registration for R 
Paper # R2020-27 
Volume (vol) vol.120 
Number (no) no.267 
Page pp.21-24 
#Pages
Date of Issue 2020-11-23 (R) 


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