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Paper Abstract and Keywords
Presentation 2021-03-03 15:55
Fabrication of zinc oxide thin film by atomic layer deposition and trial production of thin film transistor
Naoya Onizawa, Keito Sogai, Kazuki Yoshida, Kentarou Saitou, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ.) CPM2020-76
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 120, no. 408, CPM2020-76, pp. 71-73, March 2021.
Paper # CPM2020-76 
Date of Issue 2021-02-24 (CPM) 
ISSN Online edition: ISSN 2432-6380
Copyright
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reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee CPM  
Conference Date 2021-03-03 - 2021-03-03 
Place (in Japanese) (See Japanese page) 
Place (in English) Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2021-03-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of zinc oxide thin film by atomic layer deposition and trial production of thin film transistor 
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1st Author's Name Naoya Onizawa  
1st Author's Affiliation Yamagata University (Yamagata Univ.)
2nd Author's Name Keito Sogai  
2nd Author's Affiliation Yamagata University (Yamagata Univ.)
3rd Author's Name Kazuki Yoshida  
3rd Author's Affiliation Yamagata University (Yamagata Univ.)
4th Author's Name Kentarou Saitou  
4th Author's Affiliation Yamagata University (Yamagata Univ.)
5th Author's Name Kensaku Kanomata  
5th Author's Affiliation Yamagata University (Yamagata Univ.)
6th Author's Name Masanori Miura  
6th Author's Affiliation Yamagata University (Yamagata Univ.)
7th Author's Name Bashir Ahmmad  
7th Author's Affiliation Yamagata University (Yamagata Univ.)
8th Author's Name Shigeru Kubota  
8th Author's Affiliation Yamagata University (Yamagata Univ.)
9th Author's Name Fumihiko Hirose  
9th Author's Affiliation Yamagata University (Yamagata Univ.)
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Speaker Author-1 
Date Time 2021-03-03 15:55:00 
Presentation Time 15 minutes 
Registration for CPM 
Paper # CPM2020-76 
Volume (vol) vol.120 
Number (no) no.408 
Page pp.71-73 
#Pages 3 
Date of Issue 2021-02-24 (CPM) 

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