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Paper Abstract and Keywords
Presentation 2021-04-23 14:20
Issue of crystallization for LTPS TFT
Noguchi Takashi, OkadaTatsuya (Univ. Ryukyus) SDM2021-3 OME2021-3
Abstract (in Japanese) (See Japanese page) 
(in English) Abstract

Currently, poly Si TFTs are mounted on glass and are adopted for display panel s such as smart-phone,
electric camera etc.. However, there are still some issues to be solved for the fabrication of LTPS TFTs TFTs. The issues of the crystallization of Si films for TFT are described and will be discussed.
Keyword (in Japanese) (See Japanese page) 
(in English) LTPS / ELA / BLDA / Smart-phone, / TFT / Poly Si / Kei / Issue of ELA  
Reference Info. IEICE Tech. Rep., vol. 121, no. 8, SDM2021-3, pp. 13-14, April 2021.
Paper # SDM2021-3 
Date of Issue 2021-04-16 (SDM, OME) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2021-3 OME2021-3

Conference Information
Committee SDM OME  
Conference Date 2021-04-23 - 2021-04-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawaken Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. 
Paper Information
Registration To SDM 
Conference Code 2021-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Issue of crystallization for LTPS TFT 
Sub Title (in English)  
Keyword(1) LTPS  
Keyword(2) ELA  
Keyword(3) BLDA  
Keyword(4) Smart-phone,  
Keyword(5) TFT  
Keyword(6) Poly Si  
Keyword(7) Kei  
Keyword(8) Issue of ELA  
1st Author's Name Noguchi Takashi  
1st Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
2nd Author's Name OkadaTatsuya  
2nd Author's Affiliation Unversity of the Ryukyus (Univ. Ryukyus)
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Speaker Author-1 
Date Time 2021-04-23 14:20:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2021-3, OME2021-3 
Volume (vol) vol.121 
Number (no) no.8(SDM), no.9(OME) 
Page pp.13-14 
#Pages 2 
Date of Issue 2021-04-16 (SDM, OME) 

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