| Paper Abstract and Keywords |
| Presentation |
2022-04-23 09:30
3-Dimensional Imaging for Transient Thermal Diffusion in Silicon Wafer by Optical Interference Contactless Thermometry (OICT) Kotaro Matsuguchi, Keiya Fujimoto, Yu Jiawen, Hiroaki Hanafusa, Takuma Sato, Seiichiro Higashi (Hiroshima Univ.) SDM2022-8 OME2022-8 |
| Abstract |
(in Japanese) |
(See Japanese page) |
| (in English) |
(Not available yet) |
| Keyword |
(in Japanese) |
(See Japanese page) |
| (in English) |
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| Reference Info. |
IEICE Tech. Rep., vol. 122, no. 8, SDM2022-8, pp. 39-42, April 2022. |
| Paper # |
SDM2022-8 |
| Date of Issue |
2022-04-15 (SDM, OME) |
| ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Download PDF |
SDM2022-8 OME2022-8 |
| Conference Information |
| Committee |
OME SDM |
| Conference Date |
2022-04-22 - 2022-04-23 |
| Place (in Japanese) |
(See Japanese page) |
| Place (in English) |
Takachiho Hall |
| Topics (in Japanese) |
(See Japanese page) |
| Topics (in English) |
Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
| Paper Information |
| Registration To |
SDM |
| Conference Code |
2022-04-OME-SDM |
| Language |
Japanese |
| Title (in Japanese) |
(See Japanese page) |
| Sub Title (in Japanese) |
(See Japanese page) |
| Title (in English) |
3-Dimensional Imaging for Transient Thermal Diffusion in Silicon Wafer by Optical Interference Contactless Thermometry (OICT) |
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| 1st Author's Name |
Kotaro Matsuguchi |
| 1st Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 2nd Author's Name |
Keiya Fujimoto |
| 2nd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 3rd Author's Name |
Yu Jiawen |
| 3rd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 4th Author's Name |
Hiroaki Hanafusa |
| 4th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 5th Author's Name |
Takuma Sato |
| 5th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
| 6th Author's Name |
Seiichiro Higashi |
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Hiroshima University (Hiroshima Univ.) |
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| Speaker |
Author-1 |
| Date Time |
2022-04-23 09:30:00 |
| Presentation Time |
25 minutes |
| Registration for |
SDM |
| Paper # |
SDM2022-8, OME2022-8 |
| Volume (vol) |
vol.122 |
| Number (no) |
no.8(SDM), no.9(OME) |
| Page |
pp.39-42 |
| #Pages |
4 |
| Date of Issue |
2022-04-15 (SDM, OME) |