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Paper Abstract and Keywords
Presentation 2022-08-08 11:45
[Invited Talk] Optimal Cell Structure/Operation Design of 3D Semicircular Split-gate Cells for Ultra-high-density Flash Memory
Tetsu Morooka, , , , , , , , , , , , , , , , , , , , , , , , (Kioxia) SDM2022-36 ICD2022-4
Abstract (in Japanese) (See Japanese page) 
(in English) Control gate split cell structure for increasing the cell density by foot-print reduction has several challenges such as leakage current of back-side cells, P/E window reduction due the fringing field effect, and random telegraph noise (RTN) increase due to smaller cell area. In this work, we overcome these challenges by optimizing read operation and cell structures, and experimentally demonstrate more than four bit/cell operation by split-gate cell arrays.
Keyword (in Japanese) (See Japanese page) 
(in English) 3D Flash Memory / Bit density / Split-gate / Floating gate / Multi-bits/cell / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 148, SDM2022-36, pp. 12-12, Aug. 2022.
Paper # SDM2022-36 
Date of Issue 2022-08-01 (SDM, ICD) 
ISSN Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2022-36 ICD2022-4

Conference Information
Committee ICD SDM ITE-IST  
Conference Date 2022-08-08 - 2022-08-10 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications 
Paper Information
Registration To SDM 
Conference Code 2022-08-ICD-SDM-IST 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Optimal Cell Structure/Operation Design of 3D Semicircular Split-gate Cells for Ultra-high-density Flash Memory 
Sub Title (in English)  
Keyword(1) 3D Flash Memory  
Keyword(2) Bit density  
Keyword(3) Split-gate  
Keyword(4) Floating gate  
Keyword(5) Multi-bits/cell  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Tetsu Morooka  
1st Author's Affiliation Kioxia Corp. (Kioxia)
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2nd Author's Affiliation Kioxia Corp. (Kioxia)
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3rd Author's Affiliation Kioxia Corp. (Kioxia)
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4th Author's Affiliation Kioxia Corp. (Kioxia)
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5th Author's Affiliation Kioxia Corp. (Kioxia)
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6th Author's Affiliation Kioxia Corp. (Kioxia)
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7th Author's Affiliation Kioxia Corp. (Kioxia)
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8th Author's Affiliation Kioxia Corp. (Kioxia)
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9th Author's Affiliation Kioxia Corp. (Kioxia)
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10th Author's Affiliation Kioxia Corp. (Kioxia)
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11th Author's Affiliation Kioxia Corp. (Kioxia)
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12th Author's Affiliation Kioxia Corp. (Kioxia)
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13th Author's Affiliation Kioxia Corp. (Kioxia)
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14th Author's Affiliation Kioxia Corp. (Kioxia)
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15th Author's Affiliation Kioxia Corp. (Kioxia)
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16th Author's Affiliation Kioxia Corp. (Kioxia)
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17th Author's Affiliation Kioxia Corp. (Kioxia)
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18th Author's Affiliation Kioxia Corp. (Kioxia)
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19th Author's Affiliation Kioxia Corp. (Kioxia)
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20th Author's Affiliation Kioxia Corp. (Kioxia)
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21st Author's Affiliation Kioxia Corp. (Kioxia)
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22nd Author's Affiliation Kioxia Corp. (Kioxia)
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23rd Author's Affiliation Kioxia Corp. (Kioxia)
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24th Author's Affiliation Kioxia Corp. (Kioxia)
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25th Author's Affiliation Kioxia Corp. (Kioxia)
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Speaker Author-1 
Date Time 2022-08-08 11:45:00 
Presentation Time 45 minutes 
Registration for SDM 
Paper # SDM2022-36, ICD2022-4 
Volume (vol) vol.122 
Number (no) no.148(SDM), no.149(ICD) 
Page p.12 
#Pages
Date of Issue 2022-08-01 (SDM, ICD) 


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