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Paper Abstract and Keywords
Presentation 2022-11-17 10:00
Generalization capability improvement of fine-defect discrimination on dielectric surface using optical linear discrimination analysis filter with error detection
Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui (Kitami Inst. Tech.) EMT2022-53
Abstract (in Japanese) (See Japanese page) 
(in English) Various optical measurement methods have been developed to precisely identify the defects on the surface of dielectric substrate. However, it is difficult to accurately identify when the defect is smaller than the wavelength of illumination because the relation of scattered waves and the defect shape becomes complicated. In this study, an optical filter is designed to discriminate the concavity and convexity of the defect. The filter is designed as optical implementation of Fisher’s linear discriminant analysis, and can discriminate by comparing the intensity after transmitting the filter with a threshold value. We further designed another filter to detect the discrimination error. Compared with a single filter, we show the effect of the second filter by numerical simulation.
Keyword (in Japanese) (See Japanese page) 
(in English) inverse-scattering analysis / optical measurement / computer-generated hologram / Fisher’s linear discriminant analysis / boundary element method / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 256, EMT2022-53, pp. 53-58, Nov. 2022.
Paper # EMT2022-53 
Date of Issue 2022-11-10 (EMT) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMT2022-53

Conference Information
Committee EMT IEE-EMT  
Conference Date 2022-11-17 - 2022-11-19 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Electromagnetic Theory, etc. 
Paper Information
Registration To EMT 
Conference Code 2022-11-EMT-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Generalization capability improvement of fine-defect discrimination on dielectric surface using optical linear discrimination analysis filter with error detection 
Sub Title (in English)  
Keyword(1) inverse-scattering analysis  
Keyword(2) optical measurement  
Keyword(3) computer-generated hologram  
Keyword(4) Fisher’s linear discriminant analysis  
Keyword(5) boundary element method  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Shingo Shimada  
1st Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
2nd Author's Name Jun-ichiro Sugisaka  
2nd Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
3rd Author's Name Koichi Hirayama  
3rd Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
4th Author's Name Takashi Yasui  
4th Author's Affiliation Kitami Institute of Technology (Kitami Inst. Tech.)
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Speaker Author-1 
Date Time 2022-11-17 10:00:00 
Presentation Time 25 minutes 
Registration for EMT 
Paper # EMT2022-53 
Volume (vol) vol.122 
Number (no) no.256 
Page pp.53-58 
#Pages 6 
Date of Issue 2022-11-10 (EMT) 

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