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Paper Abstract and Keywords
Presentation 2022-12-09 16:25
Development of field-emitter-array technology for high current operation
Hiromasa Murata, Katsuhisa Murakami, Masayoshi Nagao (AIST) ED2022-70
Abstract (in Japanese) (See Japanese page) 
(in English) In our previous study, we have developed a volcano-structured double-gate field emitter array (FEA). We have achieved high beam focusing by precisely arranging the gate electrode. Although the double gate FEA is applied to image sensor which require low current, higher current operation is necessary for the application of X-ray sources and high-frequency vacuum tube. In this study, TiN is deposited on silicon cone by reactive sputtering using Ar/N2 gas and Ti target. The volcano-structured gate electrode is formed on TiN-coated Si cone using etch-back technique. TiN-coated volcano-structured FEA demonstrated high-current operation.
Keyword (in Japanese) (See Japanese page) 
(in English) Field emitter array / Volcano structure / TiN coating / / / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 298, ED2022-70, pp. 64-65, Dec. 2022.
Paper # ED2022-70 
Date of Issue 2022-12-01 (ED) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2022-70

Conference Information
Committee ED  
Conference Date 2022-12-08 - 2022-12-09 
Place (in Japanese) (See Japanese page) 
Place (in English) 12/8 Nagoya University, 12/9 WINC AICHI 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Applications of electron and ion beam 
Paper Information
Registration To ED 
Conference Code 2022-12-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of field-emitter-array technology for high current operation 
Sub Title (in English)  
Keyword(1) Field emitter array  
Keyword(2) Volcano structure  
Keyword(3) TiN coating  
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1st Author's Name Hiromasa Murata  
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
2nd Author's Name Katsuhisa Murakami  
2nd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
3rd Author's Name Masayoshi Nagao  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2022-12-09 16:25:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2022-70 
Volume (vol) vol.122 
Number (no) no.298 
Page pp.64-65 
#Pages 2 
Date of Issue 2022-12-01 (ED) 

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