Information: Join today and make your research activities more affordable! Technical workshop participation fees and annual registration fees are available at member rates.
Notice: [Important] Announcement of Changes to Registration Fee Payment and Manuscript Upload Procedures for IEICE Technical Meetings
IEICE Technical Committee Submission System
Conference Paper's Information		 Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2022-12-22 16:50
[Poster Presentation] Q factor extraction of ScAlN, ZnO, PZT piezoelectric films without etching substrate
Yuki Shimizu (Waseda Univ.), Takahiko Yanagitani (Waseda Univ./JST) US2022-61
Abstract (in Japanese) (See Japanese page) 
(in English) In recent years, sharp passband is required for RF filters to prevent interference between neighboring bands. The sharpness of BAW filters depends on the mechanical Q factor (Q¬m) of the piezoelectric thin film in case the electric loss and acoustic leakage loss is sufficiently small. Our group previously proposed a method to extract Qm from as grown film/substrate structure. In this study, the Q¬m of ScxAl1-xN, ZnO, epitaxial Pb(ZrxTi1-x)O3 thin films were evaluated. As a result, Qm of ScxAl1-xN films decrease with increasing Sc concentration and Q¬m of Q¬m films decrease with increasing Zr concentration. We also compared the Qm of polycrystalline and epitaxially grown thin films. In addition, the effect of lateral acoustic wave leakage on extracted Qm was also investigated.
Keyword (in Japanese) (See Japanese page) 
(in English) Piezoelectric thin film / Q factor / BAW / ScAlN / PZT thin film / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 323, US2022-61, pp. 56-61, Dec. 2022.
Paper # US2022-61 
Date of Issue 2022-12-15 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2022-61

Conference Information
Committee EA US  
Conference Date 2022-12-22 - 2022-12-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Satellite Campus Hiroshima 
Topics (in Japanese) (See Japanese page) 
Topics (in English) [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2022-12-EA-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Q factor extraction of ScAlN, ZnO, PZT piezoelectric films without etching substrate 
Sub Title (in English)  
Keyword(1) Piezoelectric thin film  
Keyword(2) Q factor  
Keyword(3) BAW  
Keyword(4) ScAlN  
Keyword(5) PZT thin film  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Yuki Shimizu  
1st Author's Affiliation Waseda University/ZAIKEN (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University/ZAIKEN/JST-CREST/JST-FOREST (Waseda Univ./JST)
3rd Author's Name  
3rd Author's Affiliation ()
4th Author's Name  
4th Author's Affiliation ()
5th Author's Name  
5th Author's Affiliation ()
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
21st Author's Name  
21st Author's Affiliation ()
22nd Author's Name  
22nd Author's Affiliation ()
23rd Author's Name  
23rd Author's Affiliation ()
24th Author's Name  
24th Author's Affiliation ()
25th Author's Name  
25th Author's Affiliation ()
26th Author's Name / /
26th Author's Affiliation ()
()
27th Author's Name / /
27th Author's Affiliation ()
()
28th Author's Name / /
28th Author's Affiliation ()
()
29th Author's Name / /
29th Author's Affiliation ()
()
30th Author's Name / /
30th Author's Affiliation ()
()
31st Author's Name / /
31st Author's Affiliation ()
()
32nd Author's Name / /
32nd Author's Affiliation ()
()
33rd Author's Name / /
33rd Author's Affiliation ()
()
34th Author's Name / /
34th Author's Affiliation ()
()
35th Author's Name / /
35th Author's Affiliation ()
()
36th Author's Name / /
36th Author's Affiliation ()
()
Speaker Author-1 
Date Time 2022-12-22 16:50:00 
Presentation Time 120 minutes 
Registration for US 
Paper # US2022-61 
Volume (vol) vol.122 
Number (no) no.323 
Page pp.56-61 
#Pages 6 
Date of Issue 2022-12-15 (US) 

[Return to Top Page]

[Return to IEICE Web Page]
The Institute of Electronics, Information and Communication Engineers (IEICE), Japan