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Paper Abstract and Keywords
Presentation 2022-12-22 16:50
[Poster Presentation] Effect of electrode area on kt2 extraction methods from piezoelectric film/substrate structure
Ryo Seki, Yuki Shimizu, Keita Kondo, Takahiko Yanagitani (Waseda Univ) US2022-63
Abstract (in Japanese) (See Japanese page) 
(in English) Electromechanical coupling coefficient (kt2) is one of the important parameters to determine the performance of BAW devices. IEEE standard resonance-antiresonance method is one of the most suitable approaches to estimate kt2. However, this method needs self-standing film structure (FBAR). On the other hand, we previously proposed various kt2 determination methods without removing substrate, such as resonant frequency ratio method, conversion loss (CL) method with electromagnetic signal, and CL method with subtracting acoustic losses. In the conventional CL method, kt2 is underestimated due to diffraction loss and propagation loss in the substrate. However, CL method with electromagnetic signal, and CL method with subtracting acoustic losses eliminate these underestimations. In this study, we experimentally compared various kt2 extraction methods at the same point on the same ScAlN thin films. In addition, we experimentally and theoretically investigated the electrode size dependence on the result of kt2 estimation by using finite element analysis.
Keyword (in Japanese) (See Japanese page) 
(in English) Electromechanical coupling coefficient(kt2) / HBAR / Piezoelectric film / Electrode area / FEM / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 323, US2022-63, pp. 68-73, Dec. 2022.
Paper # US2022-63 
Date of Issue 2022-12-15 (US) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2022-63

Conference Information
Committee EA US  
Conference Date 2022-12-22 - 2022-12-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Satellite Campus Hiroshima 
Topics (in Japanese) (See Japanese page) 
Topics (in English) [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2022-12-EA-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Effect of electrode area on kt2 extraction methods from piezoelectric film/substrate structure 
Sub Title (in English)  
Keyword(1) Electromechanical coupling coefficient(kt2)  
Keyword(2) HBAR  
Keyword(3) Piezoelectric film  
Keyword(4) Electrode area  
Keyword(5) FEM  
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Keyword(7)  
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1st Author's Name Ryo Seki  
1st Author's Affiliation Waseda University (Waseda Univ)
2nd Author's Name Yuki Shimizu  
2nd Author's Affiliation Waseda University (Waseda Univ)
3rd Author's Name Keita Kondo  
3rd Author's Affiliation Waseda University (Waseda Univ)
4th Author's Name Takahiko Yanagitani  
4th Author's Affiliation Waseda University (Waseda Univ)
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Speaker Author-1 
Date Time 2022-12-22 16:50:00 
Presentation Time 120 minutes 
Registration for US 
Paper # US2022-63 
Volume (vol) vol.122 
Number (no) no.323 
Page pp.68-73 
#Pages 6 
Date of Issue 2022-12-15 (US) 

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